Imprinting Apparatus Pressure Roller Velocity Control
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Solution Overview
Problem
The existing imprinting methods for forming display devices, such as LCDs and OLEDs, face challenges in achieving a uniform thickness of the residual film on substrates, which can lead to obstacles in subsequent operations and deteriorate display quality due to non-uniform residual film thickness.
Innovation Solution
The proposed solution involves an imprinting apparatus and method that control the moving velocity and applied pressure of a pressure roller during the pressurization of an imprint mold, reducing the velocity and increasing the pressure from the starting to the ending point to ensure a uniform residual film thickness across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a constant pressure and moving velocity are applied during imprinting, then the process is simple to control, but the residual film thickness becomes non-uniform
Solution Approach 1:
The patent applies dynamics by transitioning from static constant pressure to dynamic variable pressure control. The pressure roller control unit adjusts the moving velocity and applied pressure dynamically during the imprinting process, specifically reducing velocity and increasing pressure from the starting point to the ending point of the imprint mold, thereby achieving uniform residual film thickness through dynamic adaptation rather than static uniformity
Solution Approach 2:
The patent implements parameter changes by modifying the moving velocity and applied pressure parameters during the imprinting process. The control unit varies these parameters based on the position of the pressure roller relative to the imprint mold, creating a gradient in pressure application that compensates for the natural thickness variation in the residual film
2Manufacturing precision
If the pressure roller moves at constant velocity with constant pressure, then the operation is simple, but the residual film thickness varies across the substrate
Solution Approach 1:
The patent employs feedback control through the pressure roller control unit, which monitors the position of the pressure roller and adjusts the moving velocity and applied pressure accordingly. This closed-loop control system uses position feedback to modulate pressure parameters, ensuring uniform residual film thickness while automating the complexity of the control process
3Manufacturing precision
If uniform pressure is applied across the imprint mold, then the pressure distribution is simple, but the residual film thickness becomes non-uniform
Solution Approach 1:
The patent applies local quality by creating a non-uniform pressure distribution tailored to specific locations on the imprint mold. The pressure roller control unit generates higher pressure at the ending point of the imprint mold where greater compression is needed, and lower pressure at the starting point, thereby achieving uniform residual film thickness through location-specific pressure adjustment
Data Source
AI summary
An imprinting apparatus and a method of the same which form a residual film including a uniform thickness all over a substrate. The imprinting apparatus includes a substrate support which supports a substrate which is coated with an imprint resin on an upper surface thereof, an imprint mold arranged on an upper side of the substrate support and which forms a predetermined pattern by molding the imprint resin coated on the substrate, a pressure roller which pressurizes the imprint mold to adhere closely to the substrate, a pressure roller control unit which controls the pressure roller to change a moving velocity and an applied pressure of the pressure roller according to a position of the imprint mold, and a resin curing unit which cures the imprint resin on the substrate.