In-Plane Displacement Detection Structure for Miniaturized Accelerometers
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Solution Overview
Problem
The arrangement of fixed and movable plates in existing in-plane displacement detection structures occupies a large amount of space, making them unsuitable for miniaturized designs of accelerometers.
Innovation Solution
The in-plane displacement detection structure features centrosymmetric first and second detection assemblies with stepped configurations, where first and second movable plates are suspended by elastic suspension beams, and electrode anchor points are staggered and integrated, reducing the spatial arrangement of fixed and movable plates without affecting detection capability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the fixed plates and movable plates are arranged with electrode anchor points on flat plate structures, then the electrical connection and mechanical support are ensured, but the arrangement occupies a large amount of space making miniaturization difficult
Solution Approach 1:
The electrode anchor points are nested within the projection areas of the fixed plates and movable plates. Specifically, the electrode anchor points are positioned such that their projections overlap with the projections of the corresponding plates in the thickness direction, allowing electrical connections to be made within the existing plate structures rather than requiring additional external space for anchor points and wiring.
Solution Approach 2:
The design transitions from a two-dimensional planar arrangement to a three-dimensional stacked configuration. Multiple pairs of fixed plates and movable plates are arranged in the thickness direction (vertical stacking), with electrode anchor points positioned at different heights and connected through vertical vias. This vertical arrangement significantly reduces the planar footprint while maintaining all necessary electrical connections.
2Area of stationary object
If the movable plates are made as flat plate structures suspended by elastic beams, then the mechanical suspension and displacement detection are achieved, but the space occupation increases
Solution Approach 1:
The elastic suspension beams are integrated within the projection areas of the fixed plates and movable plates. The beams are positioned such that their projections overlap with the plate projections, allowing the suspension mechanism to be contained within the existing structural footprint rather than requiring additional lateral space for separate suspension elements.
Solution Approach 2:
The suspension system utilizes the thickness direction for vertical stacking of multiple plate pairs, while the elastic beams provide lateral displacement capability. This separation of functions in different dimensions allows compact vertical arrangement while maintaining reliable mechanical suspension and displacement detection capabilities.
3Area of stationary object
If electrode anchor points are positioned on flat plates with external wiring, then electrical connection is established, but the arrangement requires more space
Solution Approach 1:
Electrode anchor points on opposite sides of each movable plate are electrically connected through conductive structures positioned within the projection area of the plate. This internal connection method eliminates the need for external wiring routing around the plate perimeters, reducing the required planar space while maintaining electrical connectivity.
Solution Approach 2:
Electrical connections between stacked plate pairs are established through vertical vias and conductive structures in the thickness direction. This vertical interconnection approach reduces the lateral space required for wiring compared to horizontal routing, enabling compact miniaturized designs while maintaining all necessary electrical pathways.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design significantly reduces the occupied space by 28.6% while maintaining the detection capability, enabling a miniaturized accelerometer design.
Implementation Method 1
The elastic suspension beam only deform in the second direction
Implementation Method 2
The capacitive accelerometers use an arrangement with fixed teeth (fixed plates) and movable teeth (movable plates), so that when a device is displaced by in-plane acceleration, a distance between the fixed plates and the movable plates changes, resulting in a change in capacitance
Data Source
AI summary
An in-plane displacement detection structure and an accelerometer are provided. The in-plane displacement detection structure includes a substrate, a detection assembly disposed on the substrate, and electrode wires. The detection assembly includes two first detection assemblies. The two first detection assemblies are centrosymmetric with each other. Each of the first detection assemblies includes a first movable plate, a first fixed plate, a second fixed plate, and a second movable plate that are sequentially disposed at intervals. Each second fixed plate and each second movable plate are stepped. Two second movable plates thereof are adjacent to each other. Each of the electrode wires is electrically connected to first electrode anchor points and second electrode anchor points of the detection assembly. In the in-plane displacement detection structure, a space occupied by fixed plates and movable plates is reduced to make it suitable for a miniaturized design of the accelerometer.