Inclination Adjusting Device with Height-Adjustable Spherical Bearings
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Solution Overview
Problem
Conventional semiconductor manufacturing devices face issues with the inclination of one member with respect to another, leading to potential distortion and operational challenges.
Innovation Solution
An inclination adjusting device using spherical surface sliding bearings with height adjustment mechanisms to precisely adjust the inclination of a second member relative to a first member, ensuring no distortion occurs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional semiconductor manufacturing devices are used, then the device structure is simple, but the inclination between members cannot be adjusted leading to distortion
Solution Approach 1:
The device is divided into multiple members (first member, second member, third member) connected through spherical surface sliding bearings, allowing independent adjustment of each member's inclination while maintaining overall structural integrity
Solution Approach 2:
Spherical surface sliding bearings are introduced as intermediary components between members, enabling precise inclination adjustment through spherical contact surfaces that accommodate angular misalignments while maintaining stable connections
2Stability of the object's composition
If members are connected without inclination adjustment mechanism, then the device complexity is low, but distortion occurs due to inclination misalignment
Solution Approach 1:
Spherical surface sliding bearings with curved contact surfaces are used instead of flat surfaces, allowing the bearings to self-adjust and accommodate inclination variations while maintaining stable and distortion-free connections between members
Solution Approach 2:
The inclination parameters of members are made adjustable through the spherical bearings, which can change their effective contact angle and position to compensate for misalignments, ensuring stable composition without requiring complex rigid adjustment mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device allows for precise and certain adjustment of the inclination of the second member relative to the first member, preventing distortion and enabling efficient operation of semiconductor manufacturing devices.
Implementation Method 1
at least three spherical surface sliding bearings provided between the first member and the second member
Implementation Method 2
spherical surface sliding bearings
Data Source
AI summary
At least three spherical surface sliding bearings provided between a first member and a second member and disposed at mutually different positions when seen in the height direction, are provided. Each of the at least three spherical surface sliding bearings has an inner ring and an outer ring, either one of the inner ring and the outer ring is attached to the first member, and the other is attached to the second member. In at least two of the at least three spherical surface sliding bearings, the height adjustment mechanism intervenes, at least either one of between one of the inner ring and the outer ring, and the first member, and between the other and the second member.