Inclined MR Sensor Insulation Layout for Uniform Detection
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Solution Overview
Problem
Magnetoresistive elements disposed on inclined surfaces exhibit undesired characteristics due to differing influences of the insulating layer on different parts of the element, leading to inconsistent performance.
Innovation Solution
A magnetic sensor design with a substrate featuring a support member with inclined surfaces, where a first insulating portion is disposed on part of the magnetic detection element and a second insulating portion is positioned forward along the inclined surface, ensuring uniform influence and desired characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single insulating layer is formed around the magnetoresistive element on the inclined surface, then the structure is simple, but the magnetoresistive element has different characteristics due to non-uniform influence of the insulating layer
Solution Approach 1:
The single insulating layer is divided into multiple insulating layers with different materials. The first insulating layer is formed closer to the inclined surface while the second insulating layer is formed farther away, creating segmented regions that can be independently optimized for their respective functions
Solution Approach 2:
Different regions of the magnetoresistive element are provided with different insulating layers having different material properties. The first insulating layer has different material composition compared to the second insulating layer, allowing each region to have tailored characteristics that compensate for the inclined surface geometry
2Measurement precision
If the magnetoresistive element is placed on an inclined surface to detect magnetic field components perpendicular to the substrate, then the detection capability is improved, but the insulating layer influences different parts of the element differently causing performance inconsistency
Solution Approach 1:
The insulating structure is segmented into multiple layers positioned at different distances from the inclined surface. This segmentation allows each layer to be optimized for its specific position, with the first layer closer to the inclined surface and the second layer farther away, ensuring uniform overall influence on the magnetoresistive element
Solution Approach 2:
Different portions of the magnetoresistive element are assigned different insulating layers with distinct material properties. This local differentiation compensates for the varying geometric relationships between the inclined surface and different parts of the element, ensuring consistent performance across the entire element
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves consistent and desired characteristics for magnetoresistive elements on inclined surfaces, enhancing the performance and reliability of the magnetic sensor.
Implementation Method 1
spin-valve magnetoresistive elements are used, for example. The spin-valve magnetoresistive element includes a magnetization pinned layer having a magnetization whose direction is fixed, a free layer having a magnetization whose direction is variable depending on the direction of an applied magnetic field
Implementation Method 2
the magnetic field containing the component in the direction perpendicular to the surface of the substrate can be detected by providing a soft magnetic body for converting a magnetic field in the direction perpendicular to the surface of the substrate into a magnetic field in the direction parallel to the surface of the substrate or locating the magnetoresistive element on an inclined surface formed on the substrate
Data Source
AI summary
A magnetic sensor includes a substrate including a top surface, an insulating layer including an inclined surface, an MR element disposed on the inclined surface, a first insulating portion of an insulating material disposed on a part of the MR element, and a second insulating portion of an insulating material disposed on another part of the MR element at a position forward of the first insulating portion in a direction along the inclined surface, the direction being a direction away from the top surface of the substrate.