Inclined Vacuum Pad Substrate Separation

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Solution Overview

Problem

The challenge in manufacturing flexible display devices is the inability to effectively separate a flexible substrate from a carrier substrate, which limits the portability and scalability of thin and flexible display devices like OLEDs.

Innovation Solution

An apparatus and method utilizing a stage with inclined vacuum pad portions to form cracks in the flexible substrate, allowing for the separation of the flexible substrate from the carrier substrate through tilting operations, facilitating the detachment process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a flexible substrate is used to enable thin and flexible display devices, then portability and flexibility are improved, but separation from the carrier substrate becomes difficult

Engineering Contradiction:

ImproveflexibilityVSAvoidseparation difficulty

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The vacuum pad portion is divided into multiple independent vacuum pads arranged in an array, allowing selective activation of different regions. This segmentation enables localized separation forces to be applied to different areas of the flexible substrate, facilitating controlled detachment from the carrier substrate while maintaining flexibility.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The vacuum pad portions are configured to be movable relative to each other, enabling dynamic adjustment of separation forces. By selectively moving and activating different vacuum pads, the system can adapt the separation process to handle the flexible substrate's unique properties, overcoming the non-separation issue while preserving flexibility.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If the substrate is made thin to achieve flexible display devices, then flexibility and portability are improved, but structural stability deteriorates

Engineering Contradiction:

ImproveflexibilityVSAvoidstructural stability

Core Design Contradiction:

Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The vacuum pad portions act as an intermediary mechanism between the separation system and the thin flexible substrate. By using vacuum pressure distributed through multiple pads, the system provides stable, controlled separation forces that prevent damage to the thin substrate while enabling successful detachment from the carrier.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the successful separation of flexible substrates from carrier substrates, preventing non-separation defects and enhancing the manufacturing process for flexible display devices, thereby improving portability and scalability.

Implementation Method 1

an adsorber facing the stage and including a plurality of vacuum pad portions

Methodology Applied

Scientific EffectVacuum adsorption: Adsorption

Data Source

PatentUS9793518B2Apparatus for separating substrate and method of separating substrate by using the same

Publication Date: 2017.10.17 SAMSUNG DISPLAY CO LTD

AI summary

An apparatus for separating a substrate and a method of separating a substrate by using the same are disclosed. In one aspect, the apparatus includes a stage and an adsorber facing the stage and comprising a plurality of vacuum pad portions. An upper surface of the stage includes a first region and a pair of second regions located on opposing sides of the first region, wherein the first region and the second regions are disposed on different planes, and wherein each of the second regions is inclined with respect to the first region.