Indenter Displacement Calibration Using an Inclined Surface Reference

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for verifying the displacement measurements of instrumented indenters are expensive, complex, or unreliable, failing to meet the accuracy and repeatability requirements of industrial standards like ISO 14577-2 and ASTM 2546.

Innovation Solution

A system comprising a stage, indenter, actuator, force and displacement detectors, and an optical detector is used to verify the accuracy of displacement measurements by comparing measured depths with calculated depths based on the geometry of an inclined surface, utilizing a controller to calibrate and verify the detectors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If laser interferometers or other expensive verification devices are used, then measurement precision and reliability are improved, but device complexity and cost increase

Engineering Contradiction:
Improvedisplacement measurement accuracyVSAvoidverification system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent creates a virtual copy of the indenter tip position by projecting the indenter tip onto the inclined surface and calculating the corresponding x-position. This virtual reference allows verification without requiring physical comparison devices like laser interferometers, thereby reducing device complexity while maintaining measurement precision.

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent replaces complex mechanical verification systems (laser interferometers) with an optical and computational approach. By using optical detection of the indenter tip position and mathematical projection onto the inclined surface, the system achieves verification through software-based calculation rather than expensive hardware.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If step-height standards or laser interferometers are used for verification, then measurement precision is improved, but cost increases

Engineering Contradiction:
Improvedisplacement measurement accuracyVSAvoidcost-effectiveness
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent uses a simple inclined surface with known geometric dimensions as a disposable, low-cost verification standard. Instead of requiring expensive laser interferometers or精密 step-height standards, the invention employs a straightforward geometric reference that can be easily manufactured and reused, significantly reducing verification costs.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent creates a virtual reference model of the indenter tip position by projecting onto the inclined surface. This virtual copy eliminates the need for expensive physical verification artifacts, allowing accurate measurement verification through computational geometry rather than costly hardware.

Inventive Principle:
Principle #26Copying

3Reliability

If multiple verification repetitions are performed, then reliability is improved, but time consumption increases

Engineering Contradiction:
Improveverification reliabilityVSAvoidverification time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system performs self-verification by using the indenter itself to measure its own displacement against the known inclined surface geometry. The indenter acts as both the measurement tool and the verified component, eliminating the need for separate verification apparatus and reducing overall verification time while maintaining reliability.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces time-consuming mechanical verification procedures with rapid optical detection and computational projection. By using optical methods to capture indenter tip positions and mathematical projection to determine verification values, the system achieves reliable verification much faster than traditional repeated mechanical measurements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Provides a cost-effective and reliable method to verify the accuracy of displacement measurements, ensuring compliance with industrial standards without the need for additional expensive equipment, such as laser interferometers.

Implementation Method 1

an optical detector configured to detect a position of the indenter tip on the inclined surface

Methodology Applied
Scientific EffectOptical detection:

Data Source

PatentUS20260043728A1Device and method to calibrate or verify the displacement-measurement system of an instrumented indenter
Publication Date: 2026.02.12 KLA CORP
  • US20260043728A1 patent drawing
  • US20260043728A1 patent drawing
  • US20260043728A1 patent drawing

AI summary

An optical detector determines a relative depth between a first position and a second position on an inclined surface. A controller determines a slope of the inclined surface based on the relative depth between the first position and the second position and the distance moved between positions. An actuator displaces a punch at a plurality of intermediate positions on the inclined surface located between the first position and the second position. A displacement detector determines a depth at which the sample is touched by the punch at each of the plurality of intermediate positions. The controller further determines a calculated depth of the inclined surface at each of the plurality of intermediate positions based on the slope of the inclined surface and the distance moved between positions. The controller further compares the depth measured by the displacement detector to each corresponding calculated depth to verify accuracy of the displacement detector.