Indium Alkoxide Composition for High-Mobility Oxide Layers

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for producing indium oxide-containing layers via printing processes face issues such as colloidal instability, incomplete formation, and high sheet resistance due to particle concepts, and inhomogeneities and roughness in sol-gel processes, which result in low charge carrier mobilities and poor layer quality.

Innovation Solution

A liquid indium alkoxide-containing composition with a specific solvent combination, including ethyl lactate, anisole, tetrahydrofurfuryl alcohol, and butyl acetate, which improves storage stability and layer homogeneity, allowing for the production of high-quality indium oxide layers with low roughness and enhanced charge carrier mobilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If particle concepts are used for producing indium oxide layers, then the layers can be formed by sintering, but colloidal instability requires dispersing additives and incomplete formation results in high sheet resistance

Engineering Contradiction:
Improvelayer formation completenessVSAvoidsheet resistance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the fundamental parameter of the precursor material from particles to molecular precursors (indium acetate and tin chloride). This molecular-level approach eliminates colloidal instability and enables complete conversion to oxide layers without residual particulate structures, thereby achieving low sheet resistance while maintaining layer formation completeness.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If sol-gel techniques are used for producing indium oxide layers, then the layers can be produced from solution, but inhomogeneities and roughness result in low charge carrier mobilities

Engineering Contradiction:
Improvesolution processabilityVSAvoidlayer homogeneity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent changes the chemical parameters of the precursor solution by using indium acetate and tin chloride instead of traditional sol-gel precursors. This modification eliminates the formation of inhomogeneous gels and rough surfaces, achieving both solution processability and high layer homogeneity with smooth surfaces that enable high charge carrier mobilities.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If vapor deposition methods are used for producing ITO layers, then high conductivity and transparency can be achieved, but the process is cost-intensive and requires high vacuum

Engineering Contradiction:
ImproveconductivityVSAvoidproduction cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces the mechanical vacuum deposition system with a solution-based printing process. By using indium acetate and tin chloride precursors that can be deposited from solution and converted to conductive oxide layers through thermal treatment, the method achieves comparable conductivity and transparency while eliminating the need for expensive high-vacuum equipment and reducing production costs.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Ease of manufacture

If indium salt solutions are used as precursors, then the layers can be produced, but higher conversion temperatures are required compared to indium alkoxides

Engineering Contradiction:
Improveprecursor availabilityVSAvoidconversion temperature
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent changes the chemical composition parameter of the precursor from indium salts to indium acetate combined with tin chloride. This specific chemical combination enables complete layer formation and oxide conversion at lower temperatures compared to traditional indium salt solutions, while maintaining good precursor availability and solution processability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition enables the production of indium oxide layers with improved homogeneity, reduced waviness and roughness, and increased charge carrier mobilities, making them suitable for semiconductor applications.

Implementation Method 1

After spin-coating the solution, the corresponding indium oxide layer is created by thermal treatment at 400 °C

Methodology Applied
Scientific EffectThermal decomposition: Pyrolysis

Implementation Method 2

a coating composition containing a metal alkoxide and/or a metal salt is thermally dried on a transparent substrate

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentEP2398935B1Composition containing indium alkoxide, process for it's preparation and use of such compositions
Publication Date: 2019.08.28 EVONIK OPERATIONS GMBH
  • EP2398935B1 patent drawingFigure 1
  • EP2398935B1 patent drawingFigure 2
  • EP2398935B1 patent drawing

AI summary

The present invention relates to a liquid composition containing indium alkoxide, comprising at least one indium alkoxide and at least three solvents L1, L2, and L3, wherein the solvent L1 is selected from the group comprising ethyl lactate, anisole, tetrahydrofurfuryl alcohol, butyl acetate, ethylene glycol diacetate, and ethyl benzoate, and the difference of the boiling points of the two solvents L2 and L3 under SATP conditions is at least 30°C, to a method for the production thereof, and to the use thereof.