Induction Concentration Plasma Apparatus Arc-Free Generation
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Solution Overview
Problem
Existing atmospheric pressure plasma generation methods, such as dielectric material barrier types, face limitations in generating high-density plasma locally without arcs, leading to inefficiencies in large area processing and increased energy loss due to dielectric material discharges, which complicates cooling and restricts mass production.
Innovation Solution
An induction concentration remote atmospheric pressure plasma generating apparatus using hot electrodes with induction electrodes, dielectric material, and a ceramic discharge electrode system, where high AC voltage is applied to generate high-density plasma without arcs, utilizing RC resonance to minimize energy loss and control plasma states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If dielectric material barrier type plasma generation is used, then arc discharge is prohibited, but plasma density is low and energy loss is high
Solution Approach 1:
The patent introduces a dielectric material layer as an intermediary between the induction electrode and discharge electrode. This dielectric layer prevents direct arc discharge while allowing electromagnetic induction to generate high-density plasma through capacitive coupling, thereby resolving the contradiction between arc prohibition and energy efficiency
Solution Approach 2:
The patent replaces the traditional direct contact mechanical discharge system with an electromagnetic induction system. By using alternating current in the induction electrode to generate electromagnetic fields that induce currents in the discharge electrode through the dielectric barrier, the system achieves arc-free plasma generation with reduced energy loss
2Area of stationary object
If remote plasma type is used, then large area processing is enabled, but plasma density is low and cooling is required
Solution Approach 1:
The patent creates localized high-density plasma regions directly at the discharge electrode surface through controlled electromagnetic induction. By concentrating the plasma generation at specific locations rather than distributed remote plasma, the system achieves high density without excessive heat generation requiring cooling
Solution Approach 2:
The patent uses alternating current at specific frequencies to drive the induction electrode, creating periodic electromagnetic fields that efficiently generate plasma. This periodic action allows control over plasma density and heat generation, enabling large area processing without excessive cooling requirements
3Ease of manufacture
If low-pressure plasma is used, then plasma generation is easy, but expensive vacuum equipment is required and batch processing is limited
Solution Approach 1:
The patent changes the operating pressure parameter from low-pressure to atmospheric pressure conditions. By using electromagnetic induction with dielectric barriers, the system maintains ease of plasma generation while eliminating the need for vacuum equipment, enabling continuous and mass production processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient generation of high-density plasma in specific regions, increasing processing efficiency, reducing energy loss, and eliminating the need for additional cooling, allowing for large area processing without unnecessary plasma generation and maintaining low heat generation.
Implementation Method 1
high AC voltage is applied to the hot electrode and the ground electrode in order to generate a plasma
Implementation Method 2
utilizing RC resonance to minimize energy loss and control plasma states
Implementation Method 3
has lots of energy loss and generation of great heat due to a dielectric material discharge
Data Source
AI summary
The present invention relates, in general, to an induction concentration remote atmospheric pressure plasma generating apparatus, and more particularly, to an induction concentration remote atmospheric pressure plasma generating apparatus in which induction electrodes, discharge electrodes and a ground electrode are used, so that a plasma can be generated in a plasma cell including several metal discharge electrodes by using one power supply device while not generating arc between the metal electrodes, and a high-density plasma is generated at local regions due to a discharge between the metal electrodes and is thus spouted to the surface of a sample by means of the pressure of a working gas. Thus, a plasma is not generated in unnecessary regions.