Inductive Coupling for Vacuum Robot Electrical Connections

Solution Overview

Problem

Conventional electronic device manufacturing systems face challenges in efficiently and precisely transporting substrates within vacuum environments due to the limitations of existing electrical connections, which are prone to fatigue, wear, and particle generation, especially when robot arms rotate beyond 360 degrees.

Innovation Solution

The implementation of a selectively engageable electrical coupling system that uses inductively coupled coils or capacitive components to provide power to electrostatic end effectors within vacuum chambers, minimizing frictional drag and allowing for continuous rotation without fixed connections, thereby reducing particle generation and extending service intervals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional fixed electrical connections are used for robot arms, then electrical power can be continuously supplied, but the connections are prone to fatigue, wear, and particle generation when robot arms rotate beyond 360 degrees

Engineering Contradiction:

Improveelectrical connection reliabilityVSAvoidparticle generation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces conventional mechanical sliding contacts with inductive coupling between primary and secondary coils. Electrical power is transferred wirelessly through magnetic coupling, eliminating mechanical wear and particle generation while enabling continuous robot arm rotation beyond 360 degrees without twisting wires

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces magnetic fields as an intermediary medium to transfer electrical power from the vacuum chamber wall to the robot arm. The primary coil on the chamber wall and secondary coil on the robot arm create a magnetic coupling that allows power transfer without direct physical contact

Inventive Principle:

Principle #24Intermediary (Mediator)

2Use of energy by moving object

If conventional fixed electrical connections are used for robot arms, then electrical power can be continuously supplied, but the connections experience frictional drag that reduces efficiency

Engineering Contradiction:

Improveelectrical power supply efficiencyVSAvoidfrictional drag

Core Design Contradiction:

Use of energy by moving objectVSLoss of energy

Solution Approach 1:

The patent replaces mechanical sliding contacts with inductive coupling between primary and secondary coils. Electrical power is transferred wirelessly through magnetic coupling, eliminating mechanical wear and particle generation while enabling continuous robot arm rotation beyond 360 degrees without twisting wires

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces magnetic fields as an intermediary medium to transfer electrical power from the vacuum chamber wall to the robot arm. The primary coil on the chamber wall and secondary coil on the robot arm create a magnetic coupling that allows power transfer without direct physical contact

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If selective engagement of electrical contacts is implemented, then wear and particle generation are reduced, but the system complexity increases

Engineering Contradiction:

Improveelectrical connection durabilityVSAvoidelectrical coupling system complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces mechanical sliding contacts with inductive coupling between primary and secondary coils. Electrical power is transferred wirelessly through magnetic coupling, eliminating mechanical wear and particle generation while enabling continuous robot arm rotation beyond 360 degrees without twisting wires

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient and precise substrate transport by maintaining electrical power to electrostatic end effectors during motion while allowing the electrical connections to disengage, reducing wear and particle generation, and enabling robots to rotate freely without twisting wires, thus enhancing system reliability and throughput.

Implementation Method 1

supplying electrical energy to electrical leads coupled to the robot by passing the electrical energy through selectively engageable contacts or inductively coupleable coils

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

an electrical coupling adapted to provide electrical energy from a power source to the robot

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS8692500B2Systems, apparatus and methods for making an electrical connection to a robot

Publication Date: 2014.04.08 APPLIED MATERIALS INC

AI summary

Systems, apparatus and methods are disclosed for allowing electrical connection to a robot apparatus. In one aspect, an electrical coupling is adapted to provide electrical power to the robot apparatus in the vacuum chamber. The electrical coupling may include engaging electrical contacts. In some embodiments, at least one of the contacts may be suspended relative to a spring such that the engaging contacts do not rotate relative to each other during arm rotation of the robot. In other embodiments, inductively coupled coils are included. Numerous other aspects are provided.