Inductively Driven Plasma Light Source With Magnetic Core
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Solution Overview
Problem
Current plasma light sources for applications like semiconductor fabrication and microscopy generate undesirable particle emissions and require high energy, leading to inefficiencies and limitations in achieving minimal unwanted emissions and high energy output.
Innovation Solution
A plasma source with a magnetic core and pulse power system that creates a localized high intensity zone in a plasma discharge region, using a rotating disk with apertures to pinch the plasma and enhance energy intensity, while minimizing unwanted emissions through a filter system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If high energy laser beams, electrons or particles are used to generate plasma, then high temperature and high density plasma is achieved, but large amount of energy is consumed and electrode particle emissions are generated
Solution Approach 1:
The patent replaces traditional mechanical/electrical discharge methods with magnetic field induction. An inductively coupled plasma source uses a magnetic field generated by a coil to induce currents in the plasma, heating it without direct electrical contact or mechanical laser beams. This substitution eliminates electrode wear and reduces energy consumption while achieving high plasma temperatures.
Solution Approach 2:
The patent introduces a magnetic field as an intermediary between the power source and the plasma. The electromagnetic field acts as a mediator that transfers energy to the plasma through induction, avoiding direct contact between electrodes and plasma, thereby eliminating particle emissions from electrodes while maintaining efficient energy transfer.
2Temperature
If electrical discharge between electrodes is used to produce plasma, then high temperature plasma is generated, but electrode particle emissions are produced
Solution Approach 1:
The patent replaces the mechanical electrical discharge system with an inductive electromagnetic field system. Instead of using physical electrodes that erode and emit particles, the plasma is heated through electromagnetic induction from a surrounding coil, eliminating the source of particle emissions while maintaining plasma temperature.
Solution Approach 2:
The patent extracts and removes the electrodes from the plasma generation system entirely. By using inductive coupling where the magnetic field penetrates through a window or opening to induce plasma without physical contact, the harmful electrode components are taken out of the system, eliminating particle emissions at their source.
3Stability of the object's composition
If uniform plasma discharge is used, then stable plasma is produced, but localized high intensity light is not achieved
Solution Approach 1:
The patent applies local quality by creating a localized high intensity zone within the plasma discharge region. A magnetic core is positioned to concentrate the magnetic field and plasma energy in a specific area, producing a focused region of high light intensity while the rest of the plasma maintains stable, uniform conditions. This allows simultaneous achievement of plasma stability and localized high illumination intensity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves a high energy plasma discharge with minimal undesirable emissions, suitable for advanced lithography and microscopy applications by concentrating energy in a localized zone and filtering out non-parallel emissions.
Implementation Method 1
a magnetic core that surrounds a portion of the plasma discharge region and a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region
Implementation Method 2
a chamber having a plasma discharge region and containing an ionizable medium
Implementation Method 3
a plasma discharge can be used to excite gases to produce activated gases containing ions, free radicals, atoms and molecules. Plasma discharges also can be used to produce electromagnetic radiation (e.g., light)
Implementation Method 4
The plasma can be a non-uniform plasma. The zone can be a region where the plasma is pinched to form a neck
Data Source
AI summary
An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region that forms a secondary circuit of a transformer. The plasma has a localized high intensity zone.