Inertial Sensor Module Interposer Stability

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Solution Overview

Problem

Inertial sensor modules face challenges in maintaining detection accuracy due to external fluctuations such as temperature changes and humidity, which can cause deformation and deviation of detection axes, leading to reduced reliability.

Innovation Solution

The inertial sensor module design includes a first and second inertial sensor mounted on an interposer with a higher elastic modulus and lower linear expansion coefficient than the substrate, which is then mounted on a second substrate with electrical terminals, ensuring stable electrical coupling and minimizing deformation under external fluctuations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If inertial sensors are mounted directly on a substrate, then device complexity is reduced, but detection accuracy reliability deteriorates under external fluctuations

Engineering Contradiction:
Improvestructure complexityVSAvoiddetection accuracy reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

An interposer substrate is introduced as an intermediary component between the inertial sensors and the main substrate. This interposer has higher elastic modulus and lower linear expansion coefficient compared to the main substrate, serving as a stable mounting platform that isolates the sensors from external fluctuations such as temperature changes and mechanical stress, thereby maintaining detection accuracy reliability without significantly increasing overall device complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs a composite structure consisting of two different substrate materials with distinct properties. The interposer substrate uses a material with higher elastic modulus and lower linear expansion coefficient, while the main substrate may have different characteristics. This composite approach allows the system to leverage the advantages of each material - the interposer provides dimensional stability for accurate sensing, while the main substrate can be optimized for other functions.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If the substrate has high flexibility, then ease of manufacture is improved, but detection precision deteriorates due to axis deviation

Engineering Contradiction:
Improvesubstrate flexibilityVSAvoiddetection precision
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The interposer substrate acts as a rigid intermediary that decouples the flexibility requirements of manufacturing from the precision requirements of sensing. The main substrate can remain flexible for ease of manufacture and integration, while the interposer provides a stable, rigid platform for mounting the inertial sensors, ensuring that detection axes remain aligned and detection precision is maintained even under external fluctuations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration maintains the reliability of detection accuracy by suppressing deformation and axis deviation, even under external stress, temperature changes, or humidity fluctuations, thereby enhancing the module's operational stability.

Implementation Method 1

a first substrate on which the first inertial sensor and the second inertial sensor are mounted

Methodology Applied
Scientific EffectElastic modulus: Elasticity

Implementation Method 2

which includes a first terminal electrically coupled to the first inertial sensor via the first substrate and a second terminal electrically coupled to the second inertial sensor via the first substrate

Methodology Applied
Scientific EffectLinear expansion coefficient: Thermal Expansion

Data Source

PatentUS20240393113A1Inertial Sensor Module And Electronic Apparatus
Publication Date: 2024.11.28 SEIKO EPSON CORP
  • US20240393113A1 patent drawing
  • US20240393113A1 patent drawing
  • US20240393113A1 patent drawing

AI summary

An inertial sensor module includes a first inertial sensor that detects a physical quantity of a first axis; a second inertial sensor that detects the physical quantity of the first axis; a first substrate on which the first inertial sensor and the second inertial sensor are mounted; and a second substrate on which the first substrate is mounted and which includes a first terminal electrically coupled to the first inertial sensor via the first substrate and a second terminal electrically coupled to the second inertial sensor via the first substrate.