Inertial Sensor Terminal Arrangement Lid Separation
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Solution Overview
Problem
In existing inertial sensors, the proximity of drive signal terminals to detection signal terminals can lead to noise interference, reducing the signal-to-noise ratio (S/N ratio) and affecting the accuracy of acceleration and angular velocity measurements.
Innovation Solution
The inertial sensor design includes separate drive signal terminals and detection signal terminals positioned outside a lid, with the lid interposed between them, ensuring sufficient separation to minimize noise interference and enhance signal reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If drive signal terminals and detection signal terminals are disposed close to each other on the same side of the lid, then the device complexity is reduced and ease of operation is improved, but noise interference increases and the S/N ratio deteriorates
Solution Approach 1:
The patent divides the terminal arrangement into two distinct groups: drive signal terminals and detection signal terminals. These groups are spatially segmented and disposed on opposite sides of the lid, preventing noise coupling while maintaining organized connectivity to the sensor elements below.
Solution Approach 2:
The lid serves as an intermediary structure that physically separates drive signal terminals from detection signal terminals. By positioning terminals on opposite sides of the lid, the lid acts as a spatial mediator that prevents direct electromagnetic coupling between drive and detection signals, thereby improving the S/N ratio.
2Measurement precision
If drive signal terminals and detection signal terminals are separated with the lid interposed between them, then the S/N ratio is improved and measurement accuracy is enhanced, but the device complexity increases
Solution Approach 1:
The patent segments the terminal connections into two distinct groups positioned on opposite sides of the lid. This segmentation approach systematically organizes the increased number of terminals and their connections, making the complex arrangement manageable through clear spatial grouping rather than random distribution.
Solution Approach 2:
The patent utilizes the vertical dimension by positioning terminals on opposite sides of the lid structure. This three-dimensional arrangement allows drive and detection terminals to be separated in the vertical direction while maintaining compact horizontal footprint, effectively managing complexity through spatial optimization.
3Ease of operation
If drive signal terminals are positioned near detection signal terminals, then the ease of connection is improved, but noise interference from drive signals adversely affects detection signals
Solution Approach 1:
The lid functions as an intermediary barrier between drive signal terminals and detection signal terminals. By requiring connections to pass through or around the lid structure, it provides electromagnetic isolation that prevents noise interference while maintaining organized connection pathways for both terminal types.
Solution Approach 2:
The patent extracts detection signal terminals from proximity to drive signal terminals by positioning them on opposite sides of the lid. This extraction removes the harmful electromagnetic influence of drive signals from the detection signal environment, isolating the sensitive detection terminals from noise sources.
Data Source
AI summary
An inertial sensor includes a substrate, a first inertial sensor element provided on the substrate, a lid bonded to the substrate so as to cover the first inertial sensor element, a first drive signal terminal that is provided outside the lid and is for a drive signal to be applied to the first inertial sensor element, and a first detection signal terminal that is provided outside the lid and is for a detection signal output from the first inertial sensor element, in which, in plan view of the substrate, the first drive signal terminal and the first detection signal terminal are provided with the lid interposed therebetween.