Infrared Ray Detecting Element Stress Balancing
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Solution Overview
Problem
Conventional infrared ray detecting elements experience twisting due to uneven stress distribution between support portions, leading to tilting, sensitivity deterioration, and potential disconnection of lead wiring patterns, which compromises detection ability.
Innovation Solution
The infrared ray detecting element features a substrate with a cavity and support portions that have specific stacking sequences of wiring patterns and insulating layers to balance stress, preventing twisting and maintaining detection sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the lead wiring pattern, insulating layer, and interlayer insulating film are stacked in different orders between support portions, then the electrical connection is established, but stress balance is lost causing twisting
Solution Approach 1:
The patent applies asymmetry by making the stacking sequences of lead wiring patterns and insulating layers different between the first and second support portions. Specifically, the first support portion has a different arrangement of lead wiring patterns and insulating layers compared to the second support portion, which compensates for the asymmetric placement of external lead portions and maintains stress balance while achieving electrical connection.
2Measurement precision
If the infrared ray detecting portion is separated from the substrate, then heat diffusion is prevented, but twisting occurs due to uneven stress
Solution Approach 1:
The patent applies local quality by providing different stacking configurations of lead wiring patterns and insulating layers at different locations (first and second support portions). This localized differentiation allows each support portion to have appropriate stress characteristics that compensate for the separation of the infrared ray detecting portion from the substrate, preventing twisting while maintaining detection sensitivity.
3Stability of the object's composition
If support portions are provided in diagonal lines, then the infrared ray detecting portion is stabilized, but lead wiring patterns may disconnect due to twisting
Solution Approach 1:
The patent applies asymmetry in the stacking sequence of lead wiring patterns and insulating layers between the first and second support portions. This asymmetric design compensates for the diagonal arrangement of support portions, maintaining stress balance and preventing twisting that would otherwise cause lead wiring pattern disconnection, thereby ensuring reliable electrical connection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents twisting of the infrared ray detecting portion, ensuring consistent sensitivity and preventing damage to support structures and lead wiring patterns, thus maintaining reliable infrared detection.
Implementation Method 1
An infrared ray detecting element receives infrared rays which cause the infrared ray detecting element to generate heat, and thus raise the temperature of the infrared ray detecting element
Implementation Method 2
An infrared ray detecting element, which uses pyroelectric substance material, detects infrared rays by utilizing the charge produced on its surface due to the temperature change
Implementation Method 3
A resistance bolometer infrared ray detecting element, which uses a resistance bolometer material, detects infrared rays by utilizing resistance values which change due to the temperature change
Implementation Method 4
A thermopile infrared ray detecting element detects infrared rays by utilizing the Seebeck effect in which thermoelectromotive force is produced by a temperature difference
Implementation Method 5
The structure in which the infrared ray detecting portion is separated from the substrate is an insulating structure capable of preventing the heat of the infrared ray detecting portion from diffusing to the substrate
Data Source
AI summary
An infrared ray detecting element includes: a substrate having a cavity; an infrared ray detecting portion including, sequentially stacked, a lower electrode layer, a detection layer, and an upper electrode layer; first and second support portions which support the infrared ray detecting portion above the cavity; and first and second external lead portions for leading electrical signals outputted from the infrared ray detecting portion, to the outside. The first support portion includes, sequentially stacked, a first upper wiring pattern, a first insulating layer, and a first lower wiring pattern. The upper electrode layer is connected to the first external lead portion via the first upper wiring pattern. The second support portion includes, sequentially stacked, a second upper wiring pattern, a second insulating layer, and a second lower wiring pattern. The lower electrode layer is connected to the second external lead portion via the second lower wiring pattern.