Infrared Thermal Detector Using LSPR Absorption

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Solution Overview

Problem

Infrared thermal detectors face challenges in achieving high sensitivity and sub-miniaturization due to increased thermal noise and reduced incident energy as pixel size decreases, limiting the size of pixels to larger than the diffraction limit of the wavelength used.

Innovation Solution

The implementation of a structure that utilizes localized surface Plasmon resonance (LSPR) to absorb infrared light, reducing thermal mass and conductance by condensing light onto a small area, allowing for a smaller pixel size while maintaining sensitivity through a patterned metal and thermistor material layer configuration, and incorporating a thermal leg with semi-rings and connectors to enhance heat dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If pixel size is decreased to achieve high resolution, then the number of pixels increases, but the amount of incident energy decreases and temperature noise increases

Engineering Contradiction:
Improvethermal detection sensitivityVSAvoidincident energy
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The patent applies local quality by creating a non-uniform thermal conductance distribution through the meander-shaped thermal leg structure. The thermal leg has varying cross-sectional areas along its length, with narrower sections providing higher thermal resistance and wider sections providing lower thermal resistance. This localized variation in thermal conductance optimizes the balance between thermal isolation (to maintain temperature sensitivity) and heat dissipation (to prevent overheating), enabling high sensitivity in miniaturized pixels without requiring uniform thermal properties throughout the structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements the nesting principle by integrating the meander-shaped thermal leg structure within the confined space of each pixel. The thermal leg is folded back on itself multiple times in a compact meander pattern, allowing a long thermal conduction path to be contained within a small pixel area. This nested configuration enables effective thermal management in miniaturized detectors by fitting complex thermal pathways into limited spatial dimensions, thereby maintaining temperature precision while reducing pixel size.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Measurement precision

If pixel size is decreased to achieve high resolution, then the number of pixels increases, but thermal noise increases due to increased thermal conductance

Engineering Contradiction:
Improvetemperature precisionVSAvoidthermal noise
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies local quality by creating a non-uniform thermal conductance distribution through the meander-shaped thermal leg structure. The thermal leg has varying cross-sectional areas along its length, with narrower sections providing higher thermal resistance and wider sections providing lower thermal resistance. This localized variation in thermal conductance optimizes the balance between thermal isolation (to maintain temperature sensitivity) and heat dissipation (to prevent overheating), enabling high sensitivity in miniaturized pixels without requiring uniform thermal properties throughout the structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by designing the thermal leg with a meander shape that enables dynamic thermal response. The varying cross-sectional areas create different thermal time constants along the thermal leg, allowing the structure to adaptively manage heat flow under different operating conditions. This dynamic thermal characterization enables the detector to optimize its thermal response time and noise performance based on the incident energy levels and environmental conditions.

Inventive Principle:
Principle #15Dynamics

3Speed

If thermal mass is reduced to improve response time, then the detector becomes more responsive, but sensitivity decreases due to reduced temperature change

Engineering Contradiction:
Improveresponse timeVSAvoidtemperature change detection
Core Design Contradiction:
SpeedVSMeasurement precision

Solution Approach 1:

The patent applies local quality by creating a non-uniform thermal conductance distribution through the meander-shaped thermal leg structure. The thermal leg has varying cross-sectional areas along its length, with narrower sections providing higher thermal resistance and wider sections providing lower thermal resistance. This localized variation in thermal conductance optimizes the balance between thermal isolation (to maintain temperature sensitivity) and heat dissipation (to prevent overheating), enabling high sensitivity in miniaturized pixels without requiring uniform thermal properties throughout the structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by designing the thermal leg with a meander shape that enables dynamic thermal response. The varying cross-sectional areas create different thermal time constants along the thermal leg, allowing the structure to adaptively manage heat flow under different operating conditions. This dynamic thermal characterization enables the detector to optimize its thermal response time and noise performance based on the incident energy levels and environmental conditions.

Inventive Principle:
Principle #15Dynamics

4Measurement precision

If thermal conductance is reduced to improve temperature sensitivity, then temperature precision increases, but heat dissipation capability decreases

Engineering Contradiction:
Improvetemperature sensitivityVSAvoidheat dissipation
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The patent applies local quality by creating a non-uniform thermal conductance distribution through the meander-shaped thermal leg structure. The thermal leg has varying cross-sectional areas along its length, with narrower sections providing higher thermal resistance and wider sections providing lower thermal resistance. This localized variation in thermal conductance optimizes the balance between thermal isolation (to maintain temperature sensitivity) and heat dissipation (to prevent overheating), enabling high sensitivity in miniaturized pixels without requiring uniform thermal properties throughout the structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements dynamics by designing the thermal leg with a meander shape that enables dynamic thermal response. The varying cross-sectional areas create different thermal time constants along the thermal leg, allowing the structure to adaptively manage heat flow under different operating conditions. This dynamic thermal characterization enables the detector to optimize its thermal response time and noise performance based on the incident energy levels and environmental conditions.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables infrared thermal detectors to achieve triple the temperature change of existing detectors in the same size, allowing for sub-miniaturization and high sensitivity with reduced thermal conductance and mass, thus overcoming the limitations of pixel size and noise.

Implementation Method 1

a structure that utilizes localized surface Plasmon resonance (LSPR) to absorb infrared light

Methodology Applied
Scientific EffectLocalized surface Plasmon resonance: Resonance

Implementation Method 2

a resistance change, a polarity change, an electromotive force change, and/or a flexural change may be generated according to characteristics of a material

Methodology Applied
Scientific EffectResistive temperature detection: Electrical Resistance

Data Source

PatentEP2581721B1Infrared thermal detector and method of manufacturing the same
Publication Date: 2019.05.08 SAMSUNG ELECTRONICS CO LTD
  • EP2581721B1 patent drawingFigure 1~2
  • EP2581721B1 patent drawingFigure 3~4
  • EP2581721B1 patent drawingFigure 5~7

AI summary

According to example embodiments, an infrared thermal detector includes a substrate, a detector spaced apart from the substrate, and a thermal leg configured to transmit a signal from the detector to the substrate. The detector is configured to absorb incident infrared light via localized surface Plasmon resonance, and the detector is configured to change a resistance value according to a temperature change caused by the absorbed infrared light.