Infrared Heating Susceptor for Large-Surface Substrates
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Solution Overview
Problem
Existing heating systems for large-area substrates, such as those used in thin-film photovoltaics, face challenges in achieving uniform temperature distribution due to substrate unevenness and poor thermal conductivity, leading to thermal stress and potential destruction, especially when rapid heating is required.
Innovation Solution
A heating system utilizing a nontransparent susceptor plate with spacers of low thermal conductivity, heated by infrared radiation, which transfers energy to the substrate through thermal radiation and conduction, ensuring homogeneous heating by minimizing direct contact and compensating for substrate inhomogeneities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the substrate is placed directly on a heating plate for rapid heating, then heating speed is improved, but temperature uniformity deteriorates due to substrate unevenness causing locally different contact
Solution Approach 1:
A susceptor plate is introduced as an intermediary between the infrared radiation source and the substrate. The susceptor plate absorbs infrared radiation and converts it to thermal energy, then transfers this energy uniformly to the substrate through thermal conduction and radiation, eliminating direct contact issues while maintaining rapid heating capability
Solution Approach 2:
The direct mechanical contact heating system is replaced with an infrared radiation-based thermal system. Instead of relying on physical contact between the heating plate and substrate, the system uses infrared radiation to heat a susceptor plate, which then transfers heat to the substrate, eliminating the problem of uneven contact
2Manufacturing precision
If a transparency body is used for heating, then temperature uniformity is improved, but control precision deteriorates because equilibrium is easily disturbed by changes in thickness or absorptivity
Solution Approach 1:
The system changes the physical parameters of the heating approach by using a susceptor plate with specific infrared absorption properties. The susceptor plate is designed to absorb infrared radiation efficiently and convert it to thermal energy, providing a more stable and controllable heating process that is less sensitive to substrate variations
3Productivity
If the substrate is heated rapidly to high temperatures, then productivity is improved, but substrate stability deteriorates due to thermal stress and potential destruction
Solution Approach 1:
The susceptor plate serves as a thermal buffer and mediator between the infrared radiation source and the substrate. It absorbs the intense infrared energy and distributes it uniformly through thermal conduction, preventing localized thermal shocks that would cause stress and damage to the substrate while still achieving rapid overall heating
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise control of the heating process, achieving high temperature uniformity and rapid heating rates without causing thermal stress, even on substrates like glass, by maintaining a significant temperature difference between the susceptor plate and the substrate, thus preventing substrate destruction.
Implementation Method 1
an infrared radiation source which is arranged and configured to heat the lower side of the susceptor plate by means of infrared radiation
Implementation Method 2
transfers the absorbed energy to the substrate to be heated by means of thermal radiation and/or thermal conduction
Implementation Method 3
transfers the absorbed energy to the substrate to be heated by means of thermal radiation and/or thermal conduction
Data Source
AI summary
The present invention relates to a heating system and to a method for heating large-surface substrates.