Inkjet Printed Color Filter Layer Fabrication
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Solution Overview
Problem
The conventional method for fabricating a color filter layer on a TFT array substrate is complex and costly, requiring multiple photo engraving processes (PEPs) and high-cost masks, which increases the fabrication cost and complexity of the pixel structure.
Innovation Solution
A method that uses an inkjet printing process to form the color filter layer directly on the TFT array substrate, reducing the number of PEPs and eliminating the need for high-precision masks, while employing a photosensitive black matrix to pattern the conductive layer and form the source and drain, thereby simplifying the process and reducing material usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple photo engraving processes (PEPs) are used to form the color filter layer, then the color filter layer can be formed with high precision, but the fabrication cost and process complexity increase significantly
Solution Approach 1:
The patent combines the color filter layer formation with the black matrix formation into a single photo engraving process. The black matrix layer serves dual functions: as the black matrix structure itself and as a mask for forming the color filter patterns. This merging eliminates the need for separate PEP steps for color filter formation, reducing process complexity while maintaining precision.
Solution Approach 2:
The black matrix layer is given multiple functions: it serves as the structural black matrix component and simultaneously as the photoresist mask for patterning the color filter layer. This multi-functionality reduces the number of separate process steps needed, addressing the contradiction between precision and complexity.
2Manufacturing precision
If multiple high-precision masks are used for PEPs, then the alignment and pattern accuracy are improved, but the fabrication cost increases
Solution Approach 1:
The patent extracts the mask function from separate mask layers and integrates it into the black matrix layer itself. By making the black matrix layer serve as the mask, the need for additional high-cost precision masks is eliminated, reducing fabrication cost while maintaining pattern accuracy through the same PEP process.
Solution Approach 2:
The black matrix layer, which would otherwise be a permanent structural component, is used temporarily as a disposable mask during the PEP process. After serving its masking function, it remains as part of the final structure, eliminating the need for separate disposable masks and reducing overall cost.
3Manufacturing precision
If the color filter layer is formed through multiple PEPs, then the color filter patterns are precisely formed, but the material usage and waste increase
Solution Approach 1:
The patent merges the color filter material deposition with the black matrix formation process. By forming both structures in the same PEP step using the black matrix as mask, material waste is reduced compared to separate processes where materials would be deposited and then partially removed in subsequent steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the fabrication cost and complexity by minimizing the number of PEPs, simplifying the process, and lowering material requirements for the color filter layer, while maintaining the quality of the pixel structure.
Implementation Method 1
a color filter layer is formed within the color filter layer accommodating opening through an inkjet printing process
Implementation Method 2
the conductive layer is patterned with the photosensitive black matrix as a mask to form a source and a drain on the channel layer
Data Source
AI summary
A pixel structure fabricating method is provided. A gate and a gate insulation layer covering the gate are formed on a substrate. A channel layer is formed on the gate insulation layer. A conductive layer is formed on the channel layer and gate insulation layer. A black matrix having a color filer layer accommodating opening is formed on the conductive layer. The black matrix includes a first block and a second block which is thicker than the first block. The conductive layer is patterned with the black matrix as a mask to form a source and a drain on the channel layer. A color filter layer is formed within the color filter layer accommodating opening through inkjet printing. A dielectric layer is formed on the black matrix and color filter layer. The dielectric layer is patterned to expose the drain. A pixel electrode electrically connected to the drain is formed.


