Inner Edge Ring Replacement via Substrate Port
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Solution Overview
Problem
The periodic replacement of edge rings in substrate processing apparatuses, such as those in plasma etching systems, often requires disassembling the chamber, which lowers the equipment's operational efficiency due to increased downtime and complexity.
Innovation Solution
A substrate processing apparatus design featuring an inner edge ring with a smaller width than the substrate input port and an outer edge ring with a greater width, along with a lift pin and transfer apparatus, allows for the replacement of the inner edge ring through the substrate input port without disassembling the chamber, utilizing a ring keeping box to manage the process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the chamber is disassembled for edge ring replacement, then the edge ring can be replaced, but the operational rate of equipment decreases
Solution Approach 1:
The edge ring is divided into an inner edge ring and an outer edge ring with different widths. The inner edge ring has a smaller width than the substrate input port, allowing it to be removed independently through the port without disassembling the chamber, while the outer edge ring remains fixed to maintain chamber integrity.
Solution Approach 2:
The inner edge ring is extracted as a separate replaceable component that can be removed through the substrate input port. This extraction allows maintenance of the critical inner edge ring without affecting the overall chamber structure or requiring full disassembly.
2Ease of repair
If the chamber is disassembled for edge ring replacement, then the edge ring can be replaced, but the replacement time increases
Solution Approach 1:
The edge ring is segmented into inner and outer portions, allowing the inner edge ring to be replaced independently through the substrate input port. This segmentation eliminates the time-consuming chamber disassembly process while enabling targeted replacement of only the worn inner component.
Solution Approach 2:
The inner edge ring is designed with preliminary considerations for easy removal through the substrate input port. The transfer apparatus and lift pin are positioned to facilitate quick extraction and insertion of the inner edge ring, reducing replacement time through pre-positioned maintenance access.
3Ease of operation
If the inner edge ring has smaller width than substrate input port, then the inner edge ring can be replaced through the substrate input port, but the structural complexity increases
Solution Approach 1:
The edge ring structure is segmented into two distinct rings with different width specifications. The inner edge ring has a smaller width designed to pass through the substrate input port, while the outer edge ring provides structural support. This segmentation enables easy replacement of the inner component without increasing overall system complexity.
Solution Approach 2:
The inner edge ring acts as an intermediary component between the substrate input port and the support. Its smaller width allows it to serve as a removable interface element that facilitates substrate access while maintaining the structural integrity provided by the outer edge ring.
Data Source
AI summary
A substrate processing apparatus includes a process chamber having a substrate input port, a support disposed in the process chamber and on which a substrate is mounted, an inner edge ring disposed adjacent to the support and having a smaller width than that of the substrate input port, and an outer edge ring disposed adjacent to the inner edge ring and having a greater width than that of the substrate input port.