Insertion Extraction Mechanism for Semiconductor Block Member Replacement

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Solution Overview

Problem

In semiconductor device manufacturing, existing insertion/extraction mechanisms for block members in inspection apparatuses are inefficient and prone to contaminating connection terminals during the attachment and detachment process, which prolongs the replacement time.

Innovation Solution

An insertion/extraction mechanism with a first engaging unit and a second engaging unit that can move between engaged and disengaged positions, allowing for the secure holding and quick replacement of block members without contacting the connection terminals, utilizing a housing with movable first and second engaging pins to lock onto pin locking portions of the block members.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If existing insertion/extraction mechanisms are used for block members, then the structure is simple, but the replacement time is prolonged and connection terminals are contaminated

Engineering Contradiction:
Improvereplacement timeVSAvoidcontamination of connection terminals
Core Design Contradiction:
Loss of timeVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a housing as an intermediary component that holds multiple engaging pins. This housing acts as a mediator between the extraction mechanism and the block member, allowing simultaneous engagement with multiple pin locking portions. The housing enables coordinated movement of all engaging pins to insert or extract the block member in one operation, preventing contamination during the process while reducing replacement time.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent combines multiple engaging pins into a single housing structure, merging their functions into one integrated component. This consolidation allows all engaging pins to move simultaneously as a unit, enabling the block member to be inserted or extracted in a single coordinated action rather than through multiple separate operations, thus reducing replacement time and preventing contamination.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If multiple engaging pins are used to hold block member, then the holding reliability is improved, but the device complexity increases

Engineering Contradiction:
Improveholding reliabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple engaging pins into a single housing structure, where the housing itself becomes the integrating component. This approach maintains the reliability benefits of multiple engagement points while reducing device complexity by eliminating the need for separate control mechanisms for each pin. The housing provides a unified structure that simplifies the overall device architecture.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The housing serves multiple functions simultaneously: it holds multiple engaging pins, provides structural support, guides the movement of all pins, and interfaces with the block member's pin locking portions. This multi-functionality reduces the need for additional components, thereby maintaining high holding reliability while avoiding increased device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of operation

If engaging units are made movable between engaged and disengaged positions, then the ease of operation is improved, but the device complexity increases

Engineering Contradiction:
Improveease of block member replacementVSAvoidmechanism complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent combines multiple engaging units into a single housing that moves as one integrated assembly. This merging allows all engaging pins to be actuated simultaneously through a single movement action, greatly simplifying the operation of replacing block members. The unified housing structure reduces the complexity that would otherwise arise from coordinating multiple independent movable engaging units.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11525859B2Insertion/extraction mechanism and method for replacing block member
Publication Date: 2022.12.13 TOKYO ELECTRON LTD
  • US11525859B2 patent drawing
  • US11525859B2 patent drawing
  • US11525859B2 patent drawing

AI summary

There is provided an insertion/extraction mechanism for having one or multiple block members being inserted into or extracted from a frame member forming an intermediate connection member that is disposed between a first member having multiple first members and a second member having multiple second terminals and electrically connects the first terminals and the second terminals, the block member having multiple connection terminals for electrically connecting the first terminals and the second terminals. The insertion/extraction mechanism comprises a first engaging unit and a second engaging unit that are engaged with a first engaged portion and a second engaged portion of the block member, respectively, thereby holding the block member.