Inspection Apparatus Footprint Reduction via Integrated Air Circulation
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Solution Overview
Problem
Conventional inspection apparatuses with FFUs in the inspection chamber increase the footprint and scale of the apparatus, making it difficult to maintain cleanliness without a significant increase in size.
Innovation Solution
An inspection apparatus with a housing that accommodates both the inspector and position adjuster in the same space, utilizing a circulation device with a cooler and foreign substance remover to circulate and clean the air, eliminating the need for an external FFU and reducing the apparatus's footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an FFU is provided in the inspection chamber to maintain cleanliness, then the cleanliness level is improved, but the apparatus footprint and scale increase
Solution Approach 1:
The patent merges the FFU function with the existing circulation duct system. The circulation duct, which already exists for temperature uniformity, is equipped with an FFU to also perform particle removal. This integration allows the same structural component to serve dual purposes: air circulation for thermal management and particle filtration for cleanliness, thereby maintaining high cleanliness levels without increasing apparatus footprint.
Solution Approach 2:
The circulation duct is designed to perform multiple functions: it circulates air for temperature uniformity within the inspection chamber and simultaneously serves as a pathway for particle-removed air when equipped with an FFU. This multi-functional design eliminates the need for separate dedicated cleaning systems, maintaining cleanliness while avoiding additional space requirements.
2Reliability
If a circulation duct with FFU is provided to remove particles, then the particle removal capability is improved, but the device complexity increases
Solution Approach 1:
The patent combines the particle removal function with the existing air circulation infrastructure. Instead of adding a separate particle removal system, the FFU is integrated into the circulation duct that already performs air movement for thermal management. This merging approach enables particle removal capability while minimizing the increase in device complexity by reusing existing structural and operational frameworks.
3Device complexity
If the inspector and position adjuster are placed in the same space, then the apparatus structure is simplified, but the risk of air contamination increases
Solution Approach 1:
The patent introduces air circulation as an intermediary mechanism between the inspector and position adjuster components. The circulation duct system actively moves air throughout the shared space, creating continuous airflow that prevents stagnant zones where contaminants could accumulate. This intermediary air flow mechanism mitigates the air contamination risk that would otherwise arise from placing sensitive components in the same space, while maintaining the structural simplicity of a unified housing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves cleanliness within the inspection space without scaling up the apparatus, maintains airtightness, and cools the internal components effectively, while simplifying the structure and reducing the risk of air contamination.
Implementation Method 1
a circulation device configured to circulate a gas by the gas flow source between the inside of the inspector and a region where the position adjuster is located within the space, the circulation device including a cooler configured to cool the gas being circulated
Implementation Method 2
a foreign substance remover configured to remove a foreign substance from the gas being circulated
Implementation Method 3
a gas flow source provided within the inspector and configured to generate a gas flow which cools an inside of the inspector
Data Source
AI summary
An inspection apparatus configured to inspect a target object includes an inspector configured to perform an inspection of an electrical characteristic upon the target object; a gas flow source provided within the inspector and configured to generate a gas flow which cools an inside of the inspector; a position adjuster configured to place the target object thereon and perform a position adjustment between the placed target object and the inspector; a housing which accommodates the inspector and the position adjuster in a same space; and a circulation device configured to circulate a gas by the gas flow source between the inside of the inspector and a region where the position adjuster is located within the space, the circulation device including a cooler configured to cool the gas being circulated and a foreign substance remover configured to remove a foreign substance from the gas being circulated.