Integral Cast Drive Frame for Semiconductor Conveyance Rigidity
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Solution Overview
Problem
Conveyance devices used in semiconductor manufacturing face stress and potential distortion due to reaction forces during arm movement, particularly rotational forces that cause shear stress in the casing and drive-portion support frame, risking damage.
Innovation Solution
A drive device with an actuator and frame formed by integral molding, where the actuator is connected to a division wall within a chamber, enhancing rigidity and durability by evenly distributing stress through equiangularly arranged motors and guide shafts, and a raising and lowering mechanism to prevent damage from reaction forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a drive portion support frame and casing are used to support the actuator, then the device can be assembled from separate components, but the frame and casing may distort or be damaged due to reaction forces during arm movement
Solution Approach 1:
The patent merges the drive portion support frame and casing into a single integral molded frame structure. This integration eliminates the weak connection interface between separate components, allowing the structure to withstand reaction forces during arm movement without distortion or damage. The actuator is then installed within this unified integral structure, maintaining ease of manufacture while significantly improving strength and rigidity.
2Device complexity
If the casing is connected to the base plate to support the drive portion, then the structure can be simplified, but shear stress concentrates at the connection portion causing potential damage
Solution Approach 1:
The patent combines the casing and base plate connection into an integral molded structure where the connection portion is formed as a continuous, unified component. This eliminates the separate connection interface that would concentrate shear stress, distributing the stress evenly throughout the integrated structure. The simplification is maintained while the stress concentration problem is resolved through the continuous material flow in the integral design.
3Ease of manufacture
If separate components are used for the drive portion support, then manufacturing and assembly are easier, but the connection interface becomes a weak point under rotational load
Solution Approach 1:
The patent integrates the drive portion support frame and casing into a single molded component, eliminating the connection interface that would serve as a failure point under rotational loads. The integral structure ensures continuous material flow and uniform stress distribution, significantly improving reliability while maintaining manufacturing efficiency through single-piece molding techniques.
Solution Approach 2:
The patent employs integral molding technology to create a unified structure from materials optimized for both manufacturability and mechanical performance. The molded frame can incorporate reinforcement features, varying wall thicknesses, and material compositions that balance ease of manufacture with high durability under rotational and reaction forces.
Data Source
AI summary
To provide a drive device rigid enough to endure a stress due to a reaction during driving of an arm unit, and to provide a conveyance device including the same.A drive device includes a frame and an actuator installed in the frame. The frame is formed by integral molding by casting. The frame includes a connecting portion connectable to a division wall of a conveyance chamber, a bottom plate portion serving as an opposed portion provided to be opposed to the connecting portion, and a plurality of coupling portions that couple the connecting portion and the bottom plate portion to each other. The actuator includes three coaxial shafts (two rotating shafts and single turning shaft), three motors, and a transmission mechanism that transmits a rotational driving force by the three motors to the three shafts. The frame is formed by the integral molding, and hence it is possible to realize a drive device having a high rigidity.