Integrated Anode Inner Pole Closed Drift Ion Source
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Solution Overview
Problem
Existing closed drift ion sources face challenges in achieving efficient electron confinement and high impedance for ionization, leading to non-uniform plasma and ion beam generation, particularly in large area treatments and space applications, where size and weight are critical concerns.
Innovation Solution
A novel closed drift ion source design where the anode serves as both the center magnetic pole and electrical anode, incorporating a ceramic insulating layer to increase electron confinement and impedance, forcing electrons to cross magnetic field lines, resulting in higher energy ions and a uniform plasma/ion beam.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a separate annular anode is located between inner and outer magnetic poles, then the ion source can generate plasma, but the electron confinement is insufficient and impedance is low leading to non-uniform plasma distribution
Solution Approach 1:
The patent merges the anode and inner magnetic pole into a single integrated component. The anode is formed as the inner magnetic pole with magnetic material embedded in or on the anode structure, eliminating the need for separate annular anode and inner pole components. This integration creates a unified electromagnetic structure that simultaneously provides electrical potential and magnetic field generation, improving electron confinement while maintaining plasma uniformity.
Solution Approach 2:
The integrated anode-inner pole structure performs multiple functions simultaneously: it serves as the electrical anode for plasma generation, as the inner magnetic pole for field confinement, and as part of the structural support. This multi-functionality reduces component count and complexity while achieving both good electron confinement and uniform plasma distribution.
2Reliability
If traditional closed drift ion source design with separate components is used, then the ion source functions properly, but the size and weight are large which is problematic for space applications
Solution Approach 1:
The patent combines multiple separate components (annular anode, inner magnetic pole, and support structure) into a single integrated anode-inner pole assembly. This merging eliminates redundant structures and reduces the overall volume and weight of the ion source while maintaining its functional integrity for space applications.
Solution Approach 2:
The integrated structure serves multiple purposes simultaneously: electrical conduction, magnetic field generation, and structural support. This multi-functionality reduces the total component count and material usage, directly decreasing the weight and size of the ion source for space missions.
3Reliability
If traditional closed drift ion source design with separate components is used, then the ion source functions properly, but the device complexity is high with multiple separate parts
Solution Approach 1:
The patent merges the separate annular anode and inner magnetic pole into one integrated component. This consolidation reduces the number of parts that need to be manufactured, assembled, and maintained, thereby simplifying the device while preserving its essential functions for plasma generation and confinement.
Solution Approach 2:
The integrated anode-inner pole structure performs multiple functions that previously required separate components: electrical potential application, magnetic field generation, and structural positioning. This multi-functionality directly reduces device complexity by eliminating redundant components and simplifying the overall architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances electron confinement, producing a dense, uniform plasma and ion beam, improving ionization efficiency and substrate treatment, while allowing for smaller, lighter, and cost-effective ion source configurations suitable for industrial and space applications.
Implementation Method 1
A closed drift magnetic field passes over the anode between these two grounded or electrically floating poles
Implementation Method 2
An additional motion is a drift at right angles to both the magnetic and electric fields. This is termed the Hall current
Implementation Method 3
An ion accelerating electric field is created in a racetrack shape by magnetic field lines roughly orthogonal to the electric field
Implementation Method 4
incorporating a ceramic insulating layer to increase electron confinement and impedance
Implementation Method 5
producing a dense, uniform plasma and ion beam, improving ionization efficiency
Data Source
AI summary
A closed drift ion source is provided, having an anode that serves as both the center magnetic pole and as the electrical anode. The anode has an insulating material cap that produces a closed drift region to further increase the electrical impedance of the source. The ion source can be configured as a round, conventional ion source for space thruster applications or as a long, linear ion source for uniformly treating large area substrates. A particularly useful implementation uses the present invention as an anode for a magnetron sputter process.