Integrated MEM Magnetometer Package with Spacer Structure
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Solution Overview
Problem
Current magnetic field measurement apparatuses are often bulky, expensive, and high-power consuming, and face challenges in detecting small changes over large ranges due to separate manufacturing and assembly of MEM magnetometers and integrated circuits.
Innovation Solution
An integrated magnetometer package is formed by attaching an integrated circuit to one side of a MEM magnetometer substrate and creating a spacer structure on the opposite side with an opening for a movable part, allowing a permanent magnet to be mounted later, avoiding damage from magnetic forces and enabling testing without interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If MEM magnetometer and integrated circuit are manufactured separately and assembled, then manufacturing flexibility is maintained, but device complexity and assembly difficulty increase
Solution Approach 1:
The patent combines the MEM magnetometer substrate and integrated circuit into a single integrated magnetometer package. The integrated circuit is attached directly to the MEM magnetometer substrate, merging two separately manufactured components into one unified device. This reduces assembly complexity while maintaining the manufacturing flexibility of separate fabrication processes.
2Reliability
If permanent magnet is mounted before integrated circuit attachment, then magnetic field sensing is enabled, but MEM magnetometer components are damaged by magnetic forces
Solution Approach 1:
The integrated circuit is attached to the MEM magnetometer substrate before mounting the permanent magnet. This preliminary action of attaching the circuit board protects the MEM magnetometer components from the harmful magnetic forces that will be present when the permanent magnet is mounted, while still enabling magnetic field sensing capability in the final assembled device.
3Productivity
If permanent magnet is mounted early in assembly, then magnetic field detection is enabled, but testing and assembly are interfered with by magnetic forces
Solution Approach 1:
The device is assembled and tested without the permanent magnet initially mounted. The integrated circuit is attached and the device is tested for proper operation before the permanent magnet is finally mounted. This preliminary assembly and testing approach eliminates magnetic interference during critical testing phases while maintaining productivity in the final assembly step.
4Object-affected harmful factors
If integrated magnetometer package is formed with later magnet mounting, then component protection is achieved, but manufacturing process complexity increases
Solution Approach 1:
The integrated magnetometer package is formed with the integrated circuit attached to the MEM magnetometer substrate before the permanent magnet is mounted. This preliminary formation of the package structure protects the sensitive MEM components from magnetic damage during assembly, while the additional manufacturing step is offset by the protection it provides to expensive components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in a compact, cost-effective, low-power consumption apparatus capable of detecting small magnetic field changes over large ranges without damaging the MEM magnetometer components during assembly.
Implementation Method 1
mounting a permanent magnet through the opening to the movable part
Data Source
AI summary
A method of manufacturing an apparatus 200 comprising forming an integrated magnetometer package 202. Forming an integrated magnetometer package 202 includes forming a movable part 215 from a MEM magnetometer substrate 210, and attaching an integrated circuit 910 to one side 212 of the MEM magnetometer substrate. A spacer structure 410 is formed on an opposite side of the MEM magnetometer substrate such that the moveable part is exposed through an opening 420 in the spacer structure. But the moveable part cannot escape through said opening. A permanent magnet 1010 is mounted through the opening to the movable part.


