Integrated Optical Measurement Device for Multi-Parameter Analysis
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Solution Overview
Problem
Current optical measurement devices in the semiconductor industry are limited by their single-function capabilities, high costs, lengthy processing times, and the risk of damaging objects during measurement, which hinders efficient on-line monitoring and manufacturing in micro-level industries.
Innovation Solution
A multi-functioned optical measurement device integrating a light source unit, polarizer, aperture, light splitting unit, and control-processing unit to measure surface profiles, thin-film thickness, and full focal colorful images, enabling simultaneous measurement of multiple parameters with reduced equipment costs and minimized object damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple separate optical measurement devices (interferometer, confocal microscope, ellipsometer) are used to measure different parameters, then measurement precision and reliability are improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent combines three separate optical measurement devices (interferometer, confocal microscope, and ellipsometer) into a single integrated device that can perform all three measurement functions simultaneously. The device uses a unified optical path system with beam splitters to direct light to different measurement modules, eliminating the need for multiple standalone instruments while maintaining measurement precision for surface profiles, gray-level images, full focal colorful images, and thin-film thickness
Solution Approach 2:
The integrated optical measurement device is designed with multi-functionality to perform diverse measurement tasks using a single instrument. It incorporates multiple measurement modes (interferometry, confocal microscopy, and ellipsometry) within one device, allowing it to measure various parameters including surface topography, depth information, color images, and film thickness, thereby replacing multiple specialized devices with one universal instrument
2Adaptability or versatility
If multiple separate optical measurement devices are used for comprehensive measurement, then measurement coverage is improved, but processing time and manufacturing time increase
Solution Approach 1:
By merging multiple measurement functions into one integrated device, the system eliminates the sequential processing required when using separate instruments. The unified device can capture interferometry data, confocal images, and ellipsometry measurements in a single measurement session, significantly reducing the total time required for comprehensive object characterization and accelerating manufacturing workflows
Solution Approach 2:
The integrated device enables continuous measurement operations by eliminating the need to reposition or reconfigure between different instruments. The system maintains a continuous optical path and can switch between measurement modes without interrupting the measurement flow, ensuring uninterrupted data collection across all measurement parameters and improving overall productivity
3Reliability
If traditional optical measurement devices are used, then measurement capability is maintained, but risk of object damage and manufacturing cost increase
Solution Approach 1:
The patent consolidates multiple measurement functions into a single device that uses a shared optical path and light source system. This integration reduces the total number of optical components and measurement probes interacting with the object, thereby minimizing the cumulative risk of object damage while also reducing manufacturing costs through component sharing and system simplification
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated device achieves cost savings, rapid on-line monitoring, reduced manufacturing time, and minimized object damage by providing a comprehensive measurement solution for surface profiles, thin-film thickness, and colorful images, enhancing manufacturing efficiency.
Implementation Method 1
a light source unit, comprising an external light source; a collimation unit, coupling the external light source to provide a collimated reference light and a collimated subject light
Implementation Method 2
a polarizer unit, polarizing the collimated reference light and the collimated subject light, to obtain a polarized reference light and a polarized subject light
Implementation Method 3
the measured object reflecting the polarized subject light passing the light-splitting unit to generate a measured light
Implementation Method 4
the measured light and the collimated effect reference light jointly generate an interference image through the light-splitting unit
Data Source
AI summary
The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.