Integrated Resistance Sensor for Multi-Substance Detection
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Solution Overview
Problem
Existing MEMS sensors face challenges in miniaturization and accuracy due to the use of multiple elements, which complicates the detection process and makes it difficult to achieve high precision.
Innovation Solution
A sensor design with a controller that performs multiple operations, applying different voltages to conductive members to detect differences in electrical resistance, utilizing a first, second, and third detection section with resistance members, allowing for accurate detection and correction of ambient temperature influences, thereby improving sensor characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple elements are used in MEMS sensors, then detection capability is improved, but device complexity increases and miniaturization becomes difficult
Solution Approach 1:
The patent combines multiple detection sections (first, second, and third detection sections) into a single integrated element. Each detection section includes resistance members and conductive members that work together to detect different detection substances, eliminating the need for separate elements while maintaining comprehensive detection capability.
Solution Approach 2:
The single element is designed to perform multiple functions by incorporating different detection sections that can detect various detection substances. The element can operate in multiple modes (first operation, second operation, third operation) to detect different substances, making it a universal sensor that replaces multiple specialized elements.
2Measurement precision
If multiple elements are used in MEMS sensors, then detection capability is improved, but manufacturing complexity increases
Solution Approach 1:
By merging multiple detection sections into a single element, the patent reduces the number of manufacturing steps and assembly operations required. The integrated structure allows for streamlined fabrication processes while maintaining the detection capabilities that would otherwise require multiple separate elements.
3Measurement precision
If voltage is applied to conductive members to detect resistance differences, then detection precision is improved, but energy consumption increases
Solution Approach 1:
The patent employs periodic voltage application in three distinct operations. Voltage is applied to the first conductive member in the first operation, then to the second conductive member in the second operation, and alternates between these operations. This periodic voltage application pattern enables precise resistance difference detection while managing energy consumption through controlled, intermittent energizing rather than continuous operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enables highly accurate detection of multiple types of detection substances with reduced elements, allowing for miniaturization while maintaining high precision and correcting for ambient temperature changes.
Implementation Method 1
a first detection section including a first resistance member and a first conductive member, a second detection section including a second resistance member and a second conductive member, and a third detection section including a third resistance member
Implementation Method 2
the controller being configured to perform a first operation, a second operation, and a third operation. In the first operation, the controller is configured to apply a first voltage to the first conductive member, not to apply the first voltage to the second conductive member, and to detect a first value corresponding to a first difference between a first electrical resistance of the first resistive member and a second electrical resistance of the second resistive member
Data Source
AI summary
According to one embodiment, a sensor includes an element section, and a controller. The element section including a first element including a first detection section, a second element including a second detection section, and a third element including a third detection section. The first detection section includes a first resistance member and a first conductive member. The second detection section includes a second resistance member and a second conductive member. The third detection section includes a third resistance member. The controller is configured to perform a first operation, a second operation, and a third operation.