Ion Beam Cutting Calibration Flip Table Mechanism
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Solution Overview
Problem
The existing ion beam cutting calibration process is inefficient due to the sample and shielding plate being moved out of the microscope's field of vision and out of focus when observing from multiple angles, leading to complex and time-consuming calibration.
Innovation Solution
An ion beam cutting calibration system that includes a sample cutting table, coarse calibration device, microscopic observation device, and flip table, allowing for adjustable position and angle of the sample relative to the ion beam shielding plate, with a flip table that enables observation in both vertical and horizontal planes using a single microscope, reducing the need for refocusing and equipment cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the sample and shielding plate are observed from multiple angles during calibration, then the position relationship can be adjusted, but the sample and shielding plate are moved out of the microscope's field of vision and out of focus, resulting in a complex and inefficient calibration process
Solution Approach 1:
The patent introduces a flip table that enables the microscope to observe from both vertical and horizontal planes by rotating the observation dimension. This allows multi-angle observation without moving the sample or shielding plate out of focus, as the observation plane itself is rotated rather than the objects being observed. The flip table's rotation mechanism changes the dimensional perspective while maintaining the objects within the focal plane.
2Manufacturing precision
If the sample position is adjusted frequently during calibration, then the alignment can be optimized, but the calibration process becomes time-consuming and inefficient
Solution Approach 1:
The coarse calibration device performs preliminary positioning of the sample before fine adjustment, pre-establishing the sample's basic alignment with the shielding plate. This preliminary action reduces the number of frequent adjustments needed during subsequent calibration steps, as the sample is already in approximate correct position and orientation, thereby improving overall calibration efficiency while maintaining precision.
Solution Approach 2:
The patent replaces manual mechanical adjustment with an automated flip table mechanism that rotates the observation plane. This substitution eliminates the need for operators to manually reposition and refocus the sample multiple times, as the automated rotation maintains focus while changing observation angles, thus improving calibration efficiency without sacrificing alignment precision.
3Adaptability or versatility
If multiple microscopes are used to observe from different angles, then the observation coverage is improved, but the equipment cost and space occupation increase
Solution Approach 1:
The flip table enables a single microscope to perform multiple observation functions by rotating between vertical and horizontal planes. This multi-functional capability allows one microscope to replace what would traditionally require multiple fixed microscopes positioned at different angles, thereby reducing equipment space occupation while maintaining comprehensive observation coverage during calibration.
4Measurement precision
If the microscope is refocused frequently during calibration, then the observation accuracy is maintained, but the calibration time increases significantly
Solution Approach 1:
The flip table is pre-configured with rotation axes that maintain the sample and shielding plate within the microscope's focal plane during plane rotation. This preliminary setup ensures that when the observation plane is rotated between vertical and horizontal positions, the objects remain in focus, eliminating the need for frequent refocusing operations and significantly reducing calibration time while maintaining observation accuracy.
Data Source
AI summary
An ion beam cutting calibration system includes a sample cutting table, a coarse calibration device, a microscopic observation device, and a flip table. The flip table includes a flip plate, which is configured to drive the sample cutting table to swing in a vertical plane. The swing axis of the flip plate is collinear with the side edge of the top surface of the ion beam shielding plate close to the sample. Through the coordinated operation of the flip table, the microscopic observation device, the sample cutting table, and the coarse calibration device, the ion beam cutting calibration system avoids the problem that when the position relationship between the sample and the shielding plate is observed from multiple angles during calibration loading, the sample and the shielding plate are likely to be moved out of the field of vision of the microscope and out of focus.


