Ion Beam Apparatus H3+ Observation Mode Switching
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Solution Overview
Problem
Current ion beam apparatuses face challenges in switching between observation and processing modes quickly due to ion current instability and sample damage from helium ions, with hydrogen ion sources offering reduced damage but larger energy width and lower resolution.
Innovation Solution
An ion beam apparatus that switches between H3+ and heavier ion beams, utilizing a gas field ionization source with specific emitter tip termination and extraction voltage control to achieve stable and focused ion beams for both observation and processing, allowing for rapid switching without sample damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If helium ions are used for observation, then resolution is improved, but sample damage increases
Solution Approach 1:
The invention changes the ion species parameter from helium ions to H3+ ions for observation mode. H3+ ions have lower mass than helium ions, resulting in reduced sample damage while maintaining narrow energy width and high resolution through the gas field ionization source's inherent focusing capability
Solution Approach 2:
The invention uses H3+ ions as a temporary substitute for helium ions during observation. The hydrogen gas is introduced into the ion source, ionized to form H3+ ions, and after use, the gas can be exhausted and replaced with heavier ions for processing mode
2Adaptability or versatility
If ion beam types are switched by exhausting and reintroducing gas, then ion beam switching is achieved, but switching time increases
Solution Approach 1:
The invention maintains continuous operation of the ion source by keeping the gas supply system ready and using rapid valve switching to change gas flow. The ion source remains active throughout the mode transition, avoiding the need to exhaust and re-establish the ion beam from scratch
Solution Approach 2:
The invention uses dynamic control of gas flow valves to switch between hydrogen gas (for H3+ observation mode) and heavier gases (for processing mode). The valve switching mechanism allows rapid transition between gas types, enabling fast mode changes while the ion source continues operating
3Loss of time
If multiple gases are introduced simultaneously into the ion source, then switching time is shortened, but ion current stability deteriorates
Solution Approach 1:
The invention uses dynamic valve switching to control gas flow into the ion source. By rapidly opening/closing valves, the system transitions between single-gas modes (hydrogen for observation, heavier gases for processing) without maintaining simultaneous gas flow, thus preserving ion current stability while achieving fast switching
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus reduces sample damage and shortens switching time by maintaining high resolution and processable width, with H3+ ions providing improved focusing performance and reduced energy width compared to hydrogen or helium ions.
Implementation Method 1
introduce gas (ionized gas) into the vicinity of the point, field-ionize molecules of the gas, and extract the field-ionized gas molecules as an ion beam
Implementation Method 2
focusing an ion beam through the electromagnetic lens
Data Source
AI summary
According to an embodiment of the present invention, an ion beam apparatus switches between an operation mode of performing irradiation with an ion beam most including H3+ ions and an operation mode of performing irradiation with an ion beam most including ions heavier than the H3+.