Ion Beam Manipulator Delta Mechanism Precision

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Solution Overview

Problem

Conventional ion beam implanters have limitations such as slow response times, low positional accuracy, large size, high cost, and complex vacuum sealing requirements due to motorized multi-axis gantries, which hinder efficient and precise focusing of ion beams during the ion implantation process.

Innovation Solution

A compact ion beam manipulator with a delta robot-style mechanism, utilizing universal joints and a drive shaft coupled to an actuator for precise repositioning of suppression and ground electrodes within the source chamber, allowing for faster and more accurate focusing of ion beams without the need for extensive vacuum sealing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If motorized multi-axis gantries are used for electrode positioning, then electrodes can be repositioned to focus ion beams, but response time is slow and positional accuracy is reduced

Engineering Contradiction:

Improvepositional accuracyVSAvoidresponse time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces motorized multi-axis gantries with a piezoelectric actuator system. The piezoelectric actuator converts electrical signals directly to mechanical displacement, eliminating motors, gears, and complex mechanical transmission components. This substitution enables faster response times (microsecond range vs. second range) and higher positional accuracy (nanometer vs. micrometer range) for electrode positioning, directly resolving the contradiction between speed and precision in beam focusing operations

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If motorized multi-axis gantries are used for electrode positioning, then electrodes can be repositioned, but device size becomes large and vacuum sealing complexity increases

Engineering Contradiction:

Improveelectrode repositioning capabilityVSAvoidvacuum sealing complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent extracts the electrode positioning function from the vacuum environment by using piezoelectric actuators that can be mounted on the external surface of the vacuum chamber. The actuators remain outside the vacuum, connected to electrodes through magnetic coupling or flexible conduits, eliminating the need for complex vacuum-sealed mechanical interfaces while maintaining full repositioning capability. This reduces device complexity and vacuum sealing requirements

Inventive Principle:

Principle #2Taking out (Extraction)

3Adaptability or versatility

If motorized multi-axis gantries are used for electrode positioning, then electrodes can be repositioned, but system cost increases significantly

Engineering Contradiction:

Improveelectrode repositioning capabilityVSAvoidsystem cost

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive motorized multi-axis gantry systems with compact piezoelectric actuators. The piezoelectric system eliminates costly components such as motors, gearboxes, encoders, and complex control systems required for traditional gantries. The simplified architecture with fewer moving parts and lower maintenance requirements significantly reduces both initial manufacturing cost and operational cost while maintaining or improving repositioning functionality

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides faster response times, greater positional accuracy, reduced costs, and simplified vacuum sealing, enabling more efficient and precise ion beam manipulation within the ion implanter, improving micro-uniformity and reducing processing times.

Implementation Method 1

an actuator configured to extend and retract the drive shaft along a longitudinal axis of the drive shaft

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a plurality of linkages extending from the extraction electrode, at least one of the linkages including a pair of parallel support arms connected at a first end to the extraction electrode by a first pair of universal joints and connected at a second end to a bracket by a second pair of universal joints

Methodology Applied

Scientific EffectMechanical linkage: Mechanical Advantage

Data Source

PatentUS9214314B1Ion beam manipulator

Publication Date: 2015.12.15 VARIAN SEMICON EQUIP ASSC INC

AI summary

An ion beam manipulator including a suppression electrode, a ground electrode connected to the suppression electrode in a parallel, spaced-apart relationship therewith by three electrically insulating connectors, the connectors being spaced 120 degrees apart from one another around a circumference of the suppression electrode and the ground electrode, a plurality of linkages extending from the electrically insulating connectors, at least one of the linkages including a pair of parallel support arms connected at a first end to a corresponding one of the electrically insulating connecters by a first pair of universal joints and connected at a second end to a bracket by a second pair of universal joints, and a drive shaft extending from the bracket, the drive shaft coupled to an actuator configured to extend and retract the drive shaft along a longitudinal axis of the drive shaft.