Ion Beam Irradiation Device with Position Indices
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Solution Overview
Problem
Ion beam irradiation devices face challenges in maintaining uniform irradiation across large substrates due to output variations from ion sources, leading to inaccuracies in detecting the irradiation position, especially when the substrate slips during transportation.
Innovation Solution
The device incorporates a transport tray with indices that are imaged by a position detector to accurately determine the tray's position relative to the irradiation area, and an output detector to recognize when the ion beam output stops, allowing for precise compensation and re-irradiation of under-exposed areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a substrate is transported by rotating transport rollers driven by a motor, then the substrate can be moved through the irradiation area, but the transport tray may slip relative to the transport mechanism causing detection errors
Solution Approach 1:
A marks sheet is introduced as an intermediary element between the transport tray and the detection system. The marks sheet is fixed to the transport tray and contains position marks that can be accurately detected by the detection device, serving as a reliable mediator that eliminates the slippage problem between the transport mechanism and the tray
Solution Approach 2:
The position information is copied from the physical transport mechanism to the marks sheet, which provides a stable, slippage-free representation of the tray's position that can be accurately read by the detection system
2Quantity of substance
If the ion source output is increased to maintain uniform irradiation over large substrates, then the irradiation amount becomes sufficient, but the output from the ion source decreases or stops during prolonged irradiation
Solution Approach 1:
The detection device provides real-time feedback on the substrate position and irradiation status to the control device, which adjusts the ion source output accordingly. When the substrate position indicates sufficient irradiation has been delivered, the system automatically reduces or stops the ion source output, preventing both under-irradiation and output instability
Solution Approach 2:
The ion source output is made dynamic rather than static, allowing it to vary over time based on the substrate's position and the accumulated irradiation dose, enabling the system to deliver uniform irradiation while maintaining output stability
3Adaptability or versatility
If multiple ion sources are used to provide versatile irradiation characteristics, then the dose and energy can be adjusted, but the device complexity increases
Solution Approach 1:
Instead of using multiple ion sources simultaneously, the system uses a single ion source that operates at different stages of the substrate transport process, delivering partial irradiation passes that collectively achieve the desired total dose with versatile characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy of ion beam irradiation by maintaining a consistent relationship between the transport tray's position and the irradiation area, ensuring uniform irradiation across the substrate even when the ion source output varies or stops, thereby improving the overall irradiation process.
Implementation Method 1
the position detector images each of the indices at a predetermined imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged index
Implementation Method 2
an ion beam irradiation unit that irradiates, with ion beams, a predetermined irradiation position in the vacuum chamber
Data Source
AI summary
An ion beam irradiation device includes a vacuum chamber that accommodates a transport tray which holds a substrate, a transport unit that transports the transport tray in the vacuum chamber in a transport direction, an ion beam irradiation unit that irradiates, with ion beams, a predetermined irradiation position in the vacuum chamber, and a position detector that detects a position of the transport tray. The transport tray includes a plurality of indices that are arranged in the transport direction to indicate portions of the transport tray. The position detector images each of the indices at a predetermined imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged index.