Ion Extraction Optics Slidable Insert Aperture Array
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Solution Overview
Problem
Existing ion extraction apparatuses face limitations in throughput due to the size of the extraction aperture and plasma density, which can alter the ion beam's properties such as angle of incidence and distribution when attempting to increase ion current.
Innovation Solution
The use of a slidable insert and multiple extraction slits in the ion extraction optics system allows for increased ion current while maintaining spatial uniformity and angular distribution characteristics, by defining multiple apertures and slit configurations that can be adjusted to optimize ion beam delivery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the aperture size along the short dimension is increased to increase ion beam current, then the ion beam current increases, but the ability to manipulate and control the geometry of the ribbon beam becomes impractical
Solution Approach 1:
The single extraction aperture is segmented into multiple extraction apertures (first extraction aperture and second extraction aperture) arranged in an array. This segmentation allows the system to maintain a manageable aperture size while increasing the total ion beam current by providing multiple extraction paths, thus resolving the contradiction between increasing current and maintaining geometric control.
Solution Approach 2:
The extraction apertures are arranged in a two-dimensional array pattern rather than a single linear aperture. This dimensional transition allows the system to increase the effective extraction area (and thus ion current) without increasing the size of individual apertures beyond controllable limits, preserving the ability to manipulate ribbon beam geometry.
2Quantity of substance
If the power delivered to the plasma is increased to increase ion beam current, then the ion beam current increases, but the plasma density increases and consequently changes beam properties such as angle of incidence and distribution of angles of incidence
Solution Approach 1:
By segmenting the extraction into multiple apertures, the system can distribute the extraction load across several smaller apertures. This allows increased total ion current to be extracted without requiring a proportional increase in plasma density at any single extraction point, thereby maintaining stable beam properties including angle of incidence and angular distribution.
3Manufacturing precision
If the substrate is scanned at appropriate velocity to expose the substrate to targeted dose of ions, then the substrate receives uniform ion dose, but the throughput of substrate processing is limited
Solution Approach 1:
The multiple extraction apertures create multiple ribbon beams that can be arranged in an array pattern on the substrate. This segmentation of the ion beam into multiple parallel beams allows simultaneous processing of multiple substrate regions, thereby increasing throughput while maintaining uniform dose distribution through coordinated scanning of the substrate relative to the aperture array.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly increases ion current and processing throughput without altering the angle of incidence or angular spread, enabling efficient ion processing of large substrates with stable beam properties.
Implementation Method 1
ions are extracted through an extraction aperture of special geometry located in an ion extraction optics placed proximate a plasma
Data Source
AI summary
In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.