Ion Generator Mixed Solid Material Vaporization

Solution Overview

Problem

Ion generators used in semiconductor manufacturing processes face inefficiencies when generating ions from vapors produced by heating a single type of solid material, resulting in insufficient beam current and reduced lifetime.

Innovation Solution

An ion generator design that mixes a first solid material, a single substance of an impurity element, with a second solid material, a compound containing the impurity element, to generate a vapor, which is then used to create a plasma, enhancing both the beam current and the ion generator's lifetime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a single type of solid material is used to generate vapor for ion production, then the device structure is simple, but the beam current is insufficient and the lifetime is reduced

Engineering Contradiction:

Improvebeam currentVSAvoidraw material composition

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent combines multiple solid materials (first solid material and second solid material) into a mixed raw material composition. This merging of materials allows the system to achieve higher beam current and extended lifetime by leveraging the complementary properties of different materials, resolving the contradiction between simplicity and performance.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent uses a composite raw material system consisting of multiple solid materials with different characteristics. The first solid material and second solid material form a composite that, when vaporized and plasma-generated, produces superior ion beam current and generator lifetime compared to single-material systems, directly addressing the technical contradiction.

Inventive Principle:

Principle #40Composite materials

2Duration of action of stationary object

If a single type of solid material is used to generate vapor for ion production, then the operation is simple, but the ion generator lifetime is reduced

Engineering Contradiction:

Improveion generator lifetimeVSAvoidraw material composition

Core Design Contradiction:

Duration of action of stationary objectVSDevice complexity

Solution Approach 1:

The patent combines multiple solid materials (first solid material and second solid material) into a mixed raw material composition. This merging of materials allows the system to achieve higher beam current and extended lifetime by leveraging the complementary properties of different materials, resolving the contradiction between simplicity and performance.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent uses a composite raw material system consisting of multiple solid materials with different characteristics. The first solid material and second solid material form a composite that, when vaporized and plasma-generated, produces superior ion beam current and generator lifetime compared to single-material systems, directly addressing the technical contradiction.

Inventive Principle:

Principle #40Composite materials

3Productivity

If mixed solid materials are used to generate vapor, then the beam current increases, but the raw material processing becomes more complex

Engineering Contradiction:

Improvebeam currentVSAvoidraw material preparation

Core Design Contradiction:

ProductivityVSEase of manufacture

Solution Approach 1:

The patent combines multiple solid materials (first solid material and second solid material) into a mixed raw material composition. This merging of materials allows the system to achieve higher beam current and extended lifetime by leveraging the complementary properties of different materials, resolving the contradiction between simplicity and performance.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent optimizes parameters such as the mixing ratio of solid materials, heating temperature, and vapor generation conditions to achieve high beam current while maintaining manageable raw material preparation complexity. By carefully controlling these parameters, the system balances performance improvement with manufacturing ease.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly improves the beam current and extends the ion generator's operational lifetime, enabling more efficient ion implantation processes in semiconductor manufacturing.

Implementation Method 1

a vapor generating chamber for generating a vapor by heating a raw material in which a first solid material which is a single substance of an impurity element and a second solid material which is a compound containing the impurity element are mixed with each other

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 2

a plasma generating chamber for generating plasma containing ions of the impurity element by using the vapor

Methodology Applied

Scientific EffectPlasma generation: Plasma

Data Source

PatentUS11107659B2Ion generator and ion implanter

Publication Date: 2021.08.31 SUMITOMO HEAVY IND ION TECH

AI summary

There is provided an ion generator including a vapor generating chamber for generating a vapor by heating a raw material in which a first solid material which is a single substance of an impurity element and a second solid material which is a compound containing the impurity element are mixed with each other, and a plasma generating chamber for generating a plasma containing ions of the impurity element by using the vapor.