Ion Current Measurement Device with Replaceable Liner
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Solution Overview
Problem
Ion current measurement devices, such as Faraday cups, face issues with residual coating and cleaning difficulties due to ion beam interaction, leading to safety concerns and reduced device lifespan.
Innovation Solution
An ion current measurement device with a replaceable liner made of conductive materials like graphite, which covers the inner sidewall of the collecting cup, preventing residual coating formation and facilitating easy replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a Faraday cup is used to measure ion current, then ion current measurement is achieved, but residual coating accumulates on the inner wall
Solution Approach 1:
The Faraday cup is divided into two functional parts: a reusable cup body for measurement and a replaceable liner that contacts the ion beam. The liner is segmented from the main cup structure, allowing it to be replaced independently when coated, while the cup body remains intact for continued use.
Solution Approach 2:
The liner is designed as a consumable, disposable component made from inexpensive materials like graphite. It is replaced periodically when residual coating accumulates, eliminating the need to clean or maintain the expensive cup body and avoiding safety issues from cleaning phosphorous deposits.
2Ease of operation
If the ion collecting cup is cleaned to remove residual coating, then cleanliness is restored, but public safety risks arise from phosphorous ion firing
Solution Approach 1:
The harmful function of residual coating accumulation is extracted and isolated to the liner component. By removing the liner rather than cleaning the cup, the safety hazard is eliminated without requiring cleaning operations that could cause phosphorous firing.
Solution Approach 2:
Instead of repeatedly cleaning the cup (which creates safety risks), the system uses disposable liners that are replaced when coated. This eliminates the need for hazardous cleaning operations entirely.
3Productivity
If the ion current measurement device is used repeatedly, then measurement functionality is maintained, but residual pilling problem occurs
Solution Approach 1:
The measurement system is segmented into a permanent cup structure and a replaceable liner. The liner absorbs the degradation from repeated use through residual coating accumulation, while the cup maintains its measurement functionality.
Solution Approach 2:
The liner is discarded when it accumulates residual coating that would interfere with measurements. The cup body is recovered and reused without cleaning, maintaining high productivity while eliminating residual pilling issues.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces residual coating and cleaning risks, extending the device's lifespan and maintaining cleanliness by blocking ions with the replaceable liner, which is seamlessly attached and conformal to the inner sidewall.
Implementation Method 1
the replaceable liner, disposed insider the ion collecting cup, covers the continuous inner sidewall directly blocking the ions
Data Source
AI summary
The invention provides an ion current measurement device for a tool having an ion source. The ion current measurement device comprises an ion collecting cup and a replaceable liner. The ion collecting cup is disposed in the tool and the ion collecting cup possesses a cup opening facing the ion source. The replaceable liner is disposed in the ion collecting cup and the replaceable liner entirely covers a continuous inner sidewall of the ion collecting cup.