Ion Implantation Solid Packed Container Thermal Management
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Solution Overview
Problem
Conventional ion implantation apparatuses require a long time to stabilize sublimation temperature due to the solid packed container serving as both a vacuum partition and needing strength, which increases wall thickness and heat capacity, reducing operational efficiency.
Innovation Solution
The solid packed container is placed inside a vacuum partition, with a supporting part having lower thermal conductivity than the partition and container, allowing for reduced wall thickness and heat capacity, and a separate gas supply nozzle, which reduces heating requirements and heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the solid packed container serves as both vacuum partition and structural component, then structural strength is improved, but wall thickness increases and heat capacity increases
Solution Approach 1:
The invention divides the system into separate functional components: the vacuum partition (chamber wall) and the solid packed container (source material holder) are separated. The solid packed container is no longer required to provide vacuum sealing, allowing it to be made with thin walls optimized for thermal response rather than structural strength.
Solution Approach 2:
The vacuum partition function is extracted from the solid packed container and assigned to the chamber wall structure. This allows the solid packed container to be designed solely for holding and heating the solid material, with minimal wall thickness required, thereby reducing heat capacity and acceleration time.
2Strength
If the solid packed container has increased wall thickness for strength, then structural integrity is improved, but heat capacity increases
Solution Approach 1:
By separating the vacuum containment function from the material holding function, the solid packed container can use thin walls sufficient only for containing the solid material, not for withstanding vacuum pressure. This dramatically reduces the mass and heat capacity of the container.
3Strength
If the gas supply nozzle supports the solid packed container, then structural support is improved, but wall thickness of nozzle increases
Solution Approach 1:
The support function is extracted from the gas supply nozzle and assigned to a dedicated support structure. This allows the gas supply nozzle to be made with minimal wall thickness optimized for gas flow, reducing thermal mass and heat transfer to the solid material.
4Strength
If conventional support structure is used, then mechanical support is provided, but heat conductivity is high causing heat loss
Solution Approach 1:
The thermal conductivity parameter of the support structure is changed by selecting materials with low thermal conductivity (such as ceramics or specialized insulators). This reduces heat loss from the heated solid material through the support structure to the chamber wall, improving thermal efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the time to stabilize sublimation temperature, enabling faster ion beam stabilization and improved operational efficiency by minimizing heat transfer and heating needs.
Implementation Method 1
a heater sublimating the solid-state material packed in the solid packed container to generate a source gas
Implementation Method 2
an arc chamber ionizes the source gas and emits an ion beam of the ionized source gas
Data Source
AI summary
A vacuum is maintained inside a vacuum partition (1). The whole of the solid packed container (3) is disposed inside the vacuum partition (1). A heater (7) sublimates the aluminum chloride (8) packed in the solid packed container (3) to generate an aluminum chloride gas (9). An arc chamber (6) ionizes the aluminum chloride gas (9) and emits an ion beam (11) of the ionized aluminum chloride gas (9). A gas supply nozzle (10) leads the aluminum chloride gas (9) from the solid packed container (3) into the arc chamber (6). A supporting part (4) supports and fixes the solid packed container (3) on the vacuum partition (1). A thermal conductivity of the supporting part (4) is lower than thermal conductivities of the vacuum partition (1) and the solid packed container (3).