Ion Source Cooling Trap Member for Aluminum Fluoride Byproduct Management
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Solution Overview
Problem
Conventional ion source technologies face frequent maintenance issues due to the adherence of aluminum fluoride byproducts to the gas supply pipe and interior walls during aluminum ion generation, leading to clogging and instability in ion beam current.
Innovation Solution
An ion source with a detachable cooling trap member is integrated into the gas introduction pipe to trap and cool byproducts, reducing their adherence to the pipe and walls, thereby preventing clogging and maintaining a stable ion beam current.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If aluminum nitride reacts with PF3 to generate aluminum ions, then aluminum ion beam is produced, but aluminum fluoride byproduct adheres to the gas supply pipe causing clogging
Solution Approach 1:
A cooling trap member is introduced as an intermediary component between the ion generation container and the gas supply pipe. This trap member captures aluminum fluoride byproducts before they can adhere to the gas supply pipe, preventing clogging while maintaining continuous ion beam generation. The trap member acts as a mediator that intercepts harmful byproducts without interrupting the ion production process.
Solution Approach 2:
The cooling trap member changes the temperature parameter of the gas flow by cooling it down. This temperature reduction causes aluminum fluoride byproducts to condense and adhere to the cooling trap member instead of the gas supply pipe. By modifying the thermal parameter of the system, the invention redirects where byproducts deposit, protecting the critical gas supply pathways from clogging.
2Reliability
If the gas supply pipe is cooled to prevent byproduct adherence, then byproduct adhesion is reduced, but the pipe may become clogged with condensed byproducts
Solution Approach 1:
The harmful function of byproduct accumulation on the gas supply pipe is extracted and relocated to a dedicated cooling trap member. This separate component is specifically designed to capture and accumulate aluminum fluoride byproducts, isolating the accumulation problem from the critical gas supply pathway. The trap member can be easily removed and cleaned without affecting the gas supply system.
Solution Approach 2:
The gas supply system is segmented into functional zones: the ion generation container, the cooling trap member, and the gas supply pipe. By dividing the system, the invention allows the cooling trap member to specifically handle byproduct accumulation while the gas supply pipe maintains its primary function of delivering gas without clogging. This segmentation enables independent maintenance of each component.
3Reliability
If a cooling trap member is added to the gas introduction pipe, then byproduct adhesion is reduced, but the device complexity increases
Solution Approach 1:
The cooling trap member is designed as a simple, easily replaceable component that can be removed and cleaned without complex disassembly. Rather than designing a complex integrated cooling system, the invention uses a straightforward trap structure that serves its purpose effectively and can be quickly maintained, reducing the overall complexity burden on the ion source system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the adherence of aluminum fluoride byproducts, extending the maintenance cycle of the ion source and ensuring a stable ion beam current by using a cooling trap member that is detachably mounted and positioned to trap the byproducts before they adhere to the pipe and walls.
Implementation Method 1
a cooling trap member 30 which traps the byproduct in the inner space 13b of the gas introduction pipe 13
Implementation Method 2
reacting aluminum nitride or alumina, which is disposed in a container, with a fluorine-based gas (for example, PF3) introduced into the container
Data Source
AI summary
An ion source having an ion generation container configured to generate ions by reacting ionized gas introduced into the container via a tubular gas introduction pipe with an ion source material emitted in the container. The gas introduction pipe is configured to introduce the ionized gas into an inner space of the gas introduction pipe via a gas supply pipe. In the inner space of the gas introduction pipe, a detachable cooling trap member is disposed and includes a cooling trap portion configured to cool and trap a byproduct produced in the ion generation container. The cooling trap portion is disposed near a supply-side leading end of the gas supply pipe in the inner space of the gas introduction pipe and is not contact with an interior wall face of the gas introduction pipe.