Dynamic Ion Source Faceplate Temperature Control
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Solution Overview
Problem
The uniformity of the ion beam extracted from an ion source is compromised due to deposition on the faceplate, which is influenced by the temperature and species of the feed gas, leading to increased arcing and reduced ion source performance.
Innovation Solution
A system and method for dynamically varying the temperature of the faceplate by using fasteners with electronic length adjusters to modify the compressive force between the faceplate and the chamber walls, allowing for improved thermal conductivity based on the species of feed gas introduced.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If the faceplate temperature is increased to reduce deposition for carbon monoxide gas, then deposition is diminished, but deposition is enhanced for fluorine-based species
Solution Approach 1:
The patent implements dynamic temperature control of the faceplate by varying the compressive force applied by fasteners in real-time. The controller adjusts the spring length electronically based on the detected feed gas species, transforming the static temperature control system into a dynamic one that adapts to different operating conditions. This resolves the contradiction by enabling the faceplate temperature to be optimized for each specific gas species rather than being fixed.
Solution Approach 2:
The system changes the physical parameter of faceplate temperature by modifying the compressive force applied through the fasteners. The controller detects the feed gas species and adjusts the spring length accordingly, which changes the thermal conductivity between the faceplate and heat sink, thereby changing the faceplate temperature parameter to optimize deposition control for each gas type.
2Temperature
If the compressive force on the faceplate is increased to improve thermal conductivity, then faceplate temperature is reduced, but the mechanical stress on fasteners increases
Solution Approach 1:
The patent replaces the traditional mechanical fastening system with an electronically controlled system. Instead of manually adjusting fasteners or using fixed mechanical compression, the system uses an electronic length adjuster to control the spring length and compressive force. This substitution allows for precise, dynamic adjustment of the compressive force without the limitations of pure mechanical systems, enabling optimal balance between thermal conductivity and mechanical stress.
Solution Approach 2:
The system dynamically adjusts the compressive force on the faceplate based on real-time detection of feed gas species. The controller modifies the spring length electronically, creating a dynamic system that optimizes the balance between thermal conductivity (requiring higher compressive force) and mechanical stress (requiring lower compressive force) according to operational needs.
3Manufacturing precision
If deposition forms on the extraction aperture, then ion beam uniformity is compromised, but increasing faceplate temperature may enhance deposition for certain gases
Solution Approach 1:
The system implements a feedback control mechanism where the controller detects the feed gas species and uses this information to adjust the faceplate temperature accordingly. The detection system provides feedback about the operating conditions, and the controller responds by modifying the compressive force on the faceplate to optimize temperature, thereby preventing deposition that would compromise ion beam uniformity for each specific gas type.
Solution Approach 2:
The system changes the faceplate temperature parameter dynamically based on the detected feed gas species. By modifying the compressive force applied through the fasteners, the system adjusts the thermal conductivity and thus the faceplate temperature, optimizing it for each gas type to minimize deposition on the extraction aperture and maintain ion beam uniformity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces deposition on the faceplate, enhances ion beam uniformity, and extends the operational life of the ion source by adjusting the faceplate temperature without breaking vacuum or physically accessing components.
Implementation Method 1
This increased spring force increases the compressive force between the faceplate and the chamber walls, creating improved thermal conductivity
Implementation Method 2
The electronic length adjuster may be a piezoelectric actuator
Implementation Method 3
The electronic length adjuster may be a piezoelectric actuator; a solenoid
Implementation Method 4
The fasteners comprises a spring and an electronic length adjuster to adjust a length of the spring when under load. The spring may be a tension spring or a compression spring
Data Source
AI summary
A system and method for varying the temperature of a faceplate for an ion source is disclosed. The faceplate is held against the chamber walls of the ion source by a plurality of fasteners. These fasteners may include tension springs or compression springs. By changing the length of the tension spring or compression spring when under load, the spring force of the spring can be increased. This increased spring force increases the compressive force between the faceplate and the chamber walls, creating improved thermal conductivity. In certain embodiments, the length of the spring is regulated by an electronic length adjuster. This electronic length adjuster is in communication with a controller that outputs an electrical signal indicative of the desired length of the spring. Various mechanisms for adjusting the length of the spring are disclosed.