Ion Source Hydrogen Gas Extraction Electrode
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Solution Overview
Problem
Ion sources used in ion implantation applications face instability due to deposition of reaction products on extraction electrodes, leading to insulation and abnormal electrical discharges, with existing methods not addressing how to extend the time before cleaning is required.
Innovation Solution
An ion source design that includes a plasma generation chamber, a plate member with a gas supply passage for hydrogen gas, and an extraction electrode downstream, where hydrogen gas is supplied to the extraction electrode to react with halogen ions before they deposit on the electrode, reducing the formation of reaction products.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the ion source operates for a long period, then the productivity increases, but the reaction product deposits on the extraction electrode causing insulation and abnormal discharge
Solution Approach 1:
Hydrogen gas is supplied to the extraction electrode before reaction products can deposit and cause insulation. This preliminary action of introducing hydrogen prevents the formation of insulating deposits by reacting with halogen ions in advance, thereby maintaining electrical conductivity and preventing abnormal discharge during long-term operation
Solution Approach 2:
Hydrogen gas acts as an intermediary substance that reacts with halogen ions to form volatile hydrogen halides. This intermediary reaction prevents direct deposition of reaction products on the extraction electrode, maintaining its electrical properties and enabling continuous operation without cleaning
2Strength
If the extraction electrode is cooled to prevent thermal strain, then the electrode strength is maintained, but reaction products deposit more easily on the cooler surface
Solution Approach 1:
Hydrogen gas serves as an intermediary that reacts with halogen ions to form volatile hydrogen halides before they can deposit on the cooled extraction electrode. This prevents the harmful deposition effect while maintaining the beneficial cooling for thermal strain prevention
Solution Approach 2:
The chemical state of reaction products is changed from solid deposits to gaseous hydrogen halides through chemical reaction with hydrogen. This parameter change from solid to gas phase prevents deposition on the electrode surface while allowing the electrode to remain cooled for strength maintenance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses the deposition of reaction products on the extraction electrodes, allowing for extended operation time and stable ion beam extraction without the need for frequent cleaning.
Implementation Method 1
hydrogen gas is supplied to the extraction electrode to react with halogen ions before they deposit on the electrode
Implementation Method 2
the plate member is formed with a gas supply passage via which hydrogen gas is supplied to the extraction electrode
Data Source
AI summary
An ion source is provided. The ion source includes a plasma generation chamber, a plate member, and an extraction electrode. The plasma generation chamber is supplied with a halogen-containing material. The plate member is provided on an end of the plasma generation chamber located on a side toward which an ion beam is extracted. The extraction electrode is disposed downstream of the plate member. The plate member is formed with a gas supply passage via which hydrogen gas is supplied to the extraction electrode.