Ion Source Device With Intermediate Electrode for Current Control
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Solution Overview
Problem
Existing ion source devices face challenges in increasing extraction current value while maintaining required extraction energy performance, as parameters such as distance and potential difference between the container and extraction electrode are determined by other performance requirements, limiting the ability to freely set these parameters for higher current values.
Innovation Solution
The ion source device incorporates a pair of first electrodes for emitting electrons, a second electrode for enclosing electrons and supplying raw material gas, an extraction electrode for ion extraction, and an intermediate electrode with a potential difference greater than the extraction electrode, allowing for independent control of extraction current and energy by adjusting the potential differences between these electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the distance and potential difference between the container and extraction electrode are increased to increase extraction current value, then the extraction current value increases, but the extraction energy becomes excessive and deviates from required performance
Solution Approach 1:
The extraction path is segmented into two stages by introducing an intermediate electrode. The first stage (from container to intermediate electrode) provides a large potential difference for high extraction current, while the second stage (from intermediate electrode to extraction electrode) provides a small potential difference for controlled extraction energy. This segmentation allows independent optimization of current and energy parameters.
Solution Approach 2:
The intermediate electrode acts as a mediator between the container and extraction electrode. It receives ions with high energy from the first potential difference and then delivers them to the extraction electrode with a controlled second potential difference, thereby decoupling the relationship between extraction current and extraction energy.
2Productivity
If the parameters (distance and potential difference) are set to increase extraction current, then extraction current increases, but other performance requirements cannot be satisfied due to parameter coupling
Solution Approach 1:
The single extraction gap is segmented into two independent extraction gaps by the intermediate electrode. This allows the first potential difference to be optimized for extraction current while the second potential difference is optimized for extraction energy, achieving parameter independence.
Solution Approach 2:
The system transitions from a static single-gap extraction configuration to a dynamic two-stage extraction configuration, where each stage can be independently adjusted to meet different operational requirements for current and energy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables an increase in extraction current value while ensuring the required extraction energy is met, by allowing the potential difference for current determination to be set without affecting the energy determination, thereby enhancing ion extraction efficiency.
Implementation Method 1
a pair of first electrodes for emitting an electron
Implementation Method 2
a magnetic field is formed inside a container of the ion source device... when intensity of the magnetic field is properly adjusted, the electron is enclosed inside the container by an action of the magnetic field
Implementation Method 3
The electron enclosed inside the container collides with the gas molecule. As a result, the ion in a plasma state is generated inside the container
Implementation Method 4
When an extraction voltage is applied to an extraction electrode disposed at a position apart from the container, the ion is extracted from the inside of the container with energy corresponding to the extraction voltage
Data Source
AI summary
There is provided an ion source device including a pair of first electrodes for emitting an electron, a second electrode that defines a region in which the electron is enclosed and to which raw material source gas is supplied, between the pair of first electrodes, and that has a hole portion through which an ion generated by collision between the electron and the material gas is extruded, an extraction electrode disposed apart from the second electrode along an extraction direction of the ion extracted from the second electrode so that a potential difference is formed between the second electrode and the extraction electrode, and an intermediate electrode disposed between the second electrode and the extraction electrode. A first potential difference between the second electrode and the intermediate electrode is greater than a second potential difference between the second electrode and the extraction electrode.