Ion Source Multi-Pipe Heating for Uniform Gas Temperature
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Solution Overview
Problem
The existing ion source designs, such as in PTL 1, suffer from non-uniform temperature distribution of the heated gas due to a single gas inlet and eccentric nozzle configuration, leading to variations in gas temperature in the radial direction, which affects safety and stability.
Innovation Solution
The ion source incorporates a gas introduction port with a plurality of pipes extending along the ion probe, separating the heater and gas introduction port, ensuring uniform temperature distribution by supplying heated gas through multiple pipes, thereby improving safety and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single gas inlet and eccentric nozzle configuration are used, then the device complexity is reduced, but the temperature distribution uniformity deteriorates
Solution Approach 1:
The single gas inlet is segmented into multiple gas inlets (at least two), and the single nozzle is segmented into multiple nozzles. This segmentation allows gas to be supplied from multiple directions, creating a more uniform temperature distribution in the heated gas while maintaining relatively simple device structure.
2Use of energy by moving object
If the heater and gas introduction port are closely positioned, then the heating efficiency is improved, but the safety deteriorates due to high temperature exposure
Solution Approach 1:
The heater is divided into multiple heating sections corresponding to multiple gas inlets, allowing distributed heating that maintains efficiency while reducing localized thermal concentration near the gas introduction port.
3Productivity
If the gas flow path is shortened, then the productivity is improved, but the temperature distribution uniformity deteriorates
Solution Approach 1:
Different regions of the gas flow path receive heating tailored to their specific needs - gas near the inlet receives stronger heating, while gas closer to the outlet receives less heating, creating optimal temperature distribution throughout the shortened flow path.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances user safety by thermally insulating the upstream portion and achieves uniform temperature and flow rate distributions, improving the stability and reproducibility of the ion source.
Implementation Method 1
a heater (41) that increases the temperature of heated gas
Implementation Method 2
the gas introduction port (37) and the heater (41) are connected by a plurality of pipes (40)
Data Source
AI summary
An object of the present invention is to improve the safety and stability of an ion source by making a temperature distribution of a heated gas uniform while ensuring heat insulating properties. The ion source according to the present invention includes a gas introduction port inside a probe holder that holds an ion probe. A heater that increases the temperature of a heated gas and the gas introduction port are connected by a plurality of pipes which extend along an extending direction of the ion probe and are independent of each other (see FIG. 4).