Irradiation Head Coupling for Precise Positioning With Vibration Damping

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Solution Overview

Problem

Existing processing systems face challenges in accurately and efficiently adjusting the positional relationship between a movable member and an irradiation apparatus to process objects with processing light, while minimizing vibration transmission and ensuring precise positioning for effective processing.

Innovation Solution

A processing system comprising a movable member, an irradiation apparatus, a connecting apparatus with a driving member and an elastic member to adjust the positional relationship, and a vibration reduction apparatus to minimize vibrations, along with a position measurement apparatus for precise positioning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a rigid connecting apparatus is used to connect the movable member and irradiation apparatus, then structural stability is improved, but vibration transmission from the movable member to the irradiation apparatus increases

Engineering Contradiction:
Improvestructural stabilityVSAvoidvibration transmission
Core Design Contradiction:
Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a vibration reduction apparatus as an intermediary component between the movable member and irradiation apparatus. This mediator absorbs or dampens vibrations generated by the movable member before they can be transmitted to the irradiation apparatus, thereby maintaining structural stability while eliminating harmful vibration transmission.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If the positional relationship between movable member and irradiation apparatus is made adjustable, then processing precision is improved, but device complexity increases

Engineering Contradiction:
Improveprocessing precisionVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements a dynamic connecting apparatus that allows adjustable positional relationships between the movable member and irradiation apparatus. This enables precise positioning and adjustment for optimal processing, while the modular design of the connecting apparatus manages the complexity through standardized adjustable components rather than fixed rigid structures.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables precise adjustment of the positional relationship between the movable member and the irradiation apparatus, reduces vibration, and ensures effective processing by allowing for accurate positioning and efficient processing of objects with processing light.

Implementation Method 1

an elastic member that couples the movable member with the irradiation apparatus

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

a vibration reduction apparatus that reduces a vibration that is transmitted from the movable member to the irradiation apparatus

Methodology Applied
Scientific EffectVibration reduction: Damping

Implementation Method 3

an irradiation apparatus that irradiates the object with the processing light

Methodology Applied
Scientific EffectLight irradiation: Light

Data Source

PatentUS20220281104A1Processing system, processing method, robot system, connecting apparatus and end effector apparatus
Publication Date: 2022.09.08 NIKON CORP
  • US20220281104A1 patent drawing
  • US20220281104A1 patent drawing
  • US20220281104A1 patent drawing

AI summary

A processing system has: a movable member, a relative positional relationship between the movable member and a part of the object being changeable; an irradiation apparatus that irradiates an object with processing light; and a connecting apparatus that connects the movable member and the irradiation apparatus so that a relative positional relationship between the movable member and the irradiation apparatus is changeable, the connecting apparatus has: a driving member that moves at least one of the movable member and the irradiation apparatus; and an elastic member that couples the movable member with the irradiation apparatus.