Process Kit Ring Carrier Geometry That Prevents Rotation
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Solution Overview
Problem
Conventional substrate processing systems face issues with objects such as process kit rings becoming misaligned or rotating during transport, leading to non-uniform processing, damage, increased throughput, and energy consumption.
Innovation Solution
A carrier with a rotation prevention component, including fingers and a rotation prevention feature, is designed to securely hold process kit rings, preventing rotation and ensuring accurate alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional carriers without rotation prevention features are used, then the device complexity is reduced, but the manufacturing precision and reliability deteriorate due to object rotation and misalignment during transport
Solution Approach 1:
The rotation prevention component is designed to automatically engage with the process kit ring during the normal loading process, without requiring additional alignment mechanisms or complex control systems. The component's geometry itself provides the alignment and prevention function, making the system self-aligning and self-regulating
Solution Approach 2:
The rotation prevention component features an asymmetric geometry with a flat surface that contacts the flat inner surface of the process kit ring, while protrusion portions extend in specific directions to engage with the ring's curved inner surface. This asymmetric design prevents rotation by creating a unique orientation that fits only one way
2Reliability
If rotation prevention components are added to carriers, then the reliability and manufacturing precision improve, but the device complexity and ease of manufacture worsen
Solution Approach 1:
The rotation prevention component is integrated with the carrier body as a single unified structure, where the component is formed as an extension or attachment to the carrier. This merging eliminates the need for separate assembly steps and reduces the total number of parts, making manufacturing more efficient
Solution Approach 2:
The rotation prevention component is designed as a distinct functional element with specific geometric features (flat surface and protrusion portions) that can be manufactured separately and then attached to the carrier, allowing for specialized manufacturing processes optimized for each component
3Productivity
If rotation prevention features are implemented, then the productivity increases by preventing misalignment and damage, but the device complexity increases
Solution Approach 1:
The rotation prevention component automatically performs its function during the normal operation cycle without requiring additional control systems, sensors, or actuation mechanisms. The geometric design itself provides the prevention function, eliminating the need for complex control logic
Solution Approach 2:
The rotation prevention component is pre-configured on the carrier before the process kit ring is loaded. The component's geometry is designed to guide and constrain the ring into the correct orientation during loading, preventing rotation before it can occur during transport
Data Source
AI summary
A carrier includes a carrier body, fingers attached to the carrier body, and a rotation prevention component attached to the carrier body. The fingers are configured to support a process kit ring. The rotation prevention component is configured to be disposed proximate a flat inner surface of the process kit ring to prevent rotation of the process kit ring.