Arcuate L-Motion Slit Door for Plasma Deposition Uniformity
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Solution Overview
Problem
Substrate transfer slots in plasma chambers disrupt the uniformity of deposition processes by breaching the confinement liner, affecting current flow and plasma confinement, leading to inconsistent results.
Innovation Solution
A slit door with an arcuate profile and bumpers on its inner surface is used to selectively cover the substrate transfer slot, providing RF coupling and maintaining a small gap with the confinement liner to reduce plasma leakage and particle generation, while moving in an L-motion to prevent unwanted particle formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a substrate transfer slot is provided in the confinement liner to allow robotic arms to place substrates, then substrate transfer capability is enabled, but deposition uniformity deteriorates due to plasma confinement disruption
Solution Approach 1:
The harmful effect is isolated by extracting the transfer slot functionality from the confinement liner itself and placing it in a separate movable door assembly. The door can be opened for substrate transfer and closed during deposition to restore plasma confinement, thus separating the conflicting functions of substrate access and plasma containment.
Solution Approach 2:
The door assembly transitions from a static opening to a dynamic component that can move between open and closed positions. This dynamic behavior allows the system to adapt its configuration based on operational requirements - open for substrate loading/unloading, closed for deposition processing - thereby resolving the contradiction between accessibility and deposition uniformity.
2Reliability
If the slit door contacts the confinement liner directly, then sealing is improved, but particle generation increases due to friction and wear
Solution Approach 1:
A bumper element acts as an intermediary between the door and the confinement liner. This intermediate component absorbs the contact forces, providing the necessary sealing through controlled contact while preventing direct metal-to-metal friction that would generate particles. The bumper material is selected to minimize particle generation while maintaining effective sealing.
3Device complexity
If the slit door moves in a straight linear motion, then actuator simplicity is maintained, but particle formation occurs due to rubbing against the chamber wall
Solution Approach 1:
The door motion is changed from simple linear translation to an L-shaped trajectory that incorporates both vertical and horizontal components. This dimensional change in the motion path allows the door to clear the chamber wall and avoid rubbing contact, thereby preventing particle formation while still achieving the required sealing and transfer functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The slit door enhances deposition uniformity by maintaining plasma confinement and reducing particle generation, ensuring consistent substrate processing results.
Implementation Method 1
providing RF coupling and maintaining a small gap with the confinement liner to reduce plasma leakage
Implementation Method 2
The plasma can be generated through inductive coupling or capacitive coupling
Implementation Method 3
The plasma can be generated through inductive coupling or capacitive coupling
Data Source
AI summary
Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a process chamber includes a slit door having an arcuate profile and including a first plate slidably coupled to a second plate, wherein the first plate is configured to be coupled to an actuator, wherein the second plate has an inner surface that includes silicon, and wherein the inner surface includes a plurality of grooves.