L-Shaped Spring MEMS Isolation Platform for 3D Vibration Damping
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Solution Overview
Problem
Existing vibration and stress isolation systems for MEMS devices inadequately dampen vibrations and stresses in all three dimensional directions, limiting the precision and accuracy of sensors like gyroscopes and accelerometers.
Innovation Solution
A microelectromechanical vibration and stress isolation system using an L-shaped spring design that connects an isolation platform to a frame, providing vibrational attenuation in x, y, and z directions by wrapping around the perimeter, thereby reducing stresses and eliminating the need for fins in squeeze film damping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If conventional vibration isolation systems use fins for squeeze film damping, then vibration damping is provided, but the system complexity increases and manufacturing becomes more difficult
Solution Approach 1:
The patent removes the fins from the vibration isolation system, extracting the unnecessary component that added complexity. The invention achieves vibration damping through the spring mechanism itself and the resulting platform motion, eliminating the need for separate fin structures while maintaining effective vibration isolation.
Solution Approach 2:
The spring structure serves multiple functions simultaneously: it provides mechanical support, enables vibration isolation through its elastic properties, and creates the necessary platform motion for damping without requiring separate fin components. This multi-functionality reduces overall system complexity.
2Object-affected harmful factors
If conventional isolation systems use multiple components for vibration damping, then vibration isolation is achieved, but manufacturing precision requirements increase
Solution Approach 1:
By removing the fins and associated mounting structures, the patent reduces the number of components that require precise manufacturing and assembly. The simplified spring-based system has fewer tolerance requirements and is more straightforward to manufacture.
Solution Approach 2:
The patent combines the support function and vibration isolation function into a single spring structure, eliminating the need for separate fin components. This merging reduces the cumulative manufacturing precision requirements that would arise from multiple discrete components.
3Adaptability or versatility
If the spring provides equal flexibility in all three directions, then isotropic vibration isolation is achieved, but the spring design becomes more complex
Solution Approach 1:
The spring is designed with asymmetric geometry where the first and second legs have different lengths and/or different cross-sectional dimensions. This asymmetric design enables the spring to provide appropriate flexibility in different directions while maintaining a relatively simple single-piece construction, avoiding the complexity of symmetric multi-component designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves enhanced vibration and stress isolation, allowing for precise sensor output by providing 100 times more flexibility in all three-axis directions and allowing for a 30-150 Hz resonant frequency vibration isolation, while maintaining a compact and efficient design.
Implementation Method 1
A spring connects the isolation platform to the frame. The spring is L-shaped and has a first leg and a second leg each having substantially similar lengths. The spring extends from the first outer edge surface of the isolation platform and connects to the second inner edge surface of the frame.
Implementation Method 2
The fluid gap is configured to provide squeeze film damping of vibrations imparted upon the MEMS structure in at least two dimensions.
Data Source
AI summary
A microelectromechanical vibration and stress isolation system is provided. The system includes an isolation platform configured to support a transducer and having an outer perimeter. A frame surrounds the isolation platform and has inner edge surfaces that are spaced from and face the outer edge surfaces of the platform. A spring connects the isolation platform to the frame. The spring is generally L-shaped, having a first leg that connects one inner edge surface to an outer edge surface while extending around a corner of the platform.