Laminated Magnetic Core Fabrication for Low-Loss Miniaturization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current methods for producing ultra-miniature magnetic devices with high saturation, low-loss magnetic cores are either incompatible with semiconductor fabrication processes or increase costs, making them non-competitive.
Innovation Solution
The development of a method for fabricating ultra-miniature magnetic devices using high-volume semiconductor processes, which includes self-patterned, highly-laminated magnetic cores with a single photolithography step, reducing size and cost while enhancing product quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If traditional manufacturing techniques are used to produce magnetic cores, then manufacturing cost and process complexity are reduced, but the saturation level and loss characteristics deteriorate
Solution Approach 1:
The magnetic core is divided into multiple thin laminated layers (e.g., 5-10 layers) deposited sequentially on the mold sidewalls. Each layer is electrically isolated by insulating layers, creating a segmented structure that reduces eddy current losses while maintaining manufacturing compatibility through standardized semiconductor processes.
Solution Approach 2:
The magnetic core uses composite laminated structures combining magnetic material layers with insulating layers. This composite approach reduces core losses by blocking eddy current paths while maintaining magnetic performance, and is achieved through compatible semiconductor deposition processes.
2Manufacturing precision
If multiple photolithography steps are used for each lamination, then manufacturing precision is improved, but device cost increases
Solution Approach 1:
A single photolithography step is performed upfront to define the mold pattern and cavity. The mold structure with sloped sidewalls is pre-formed to guide subsequent material deposition, eliminating the need for repeated photolithography steps for each lamination layer while maintaining precision through the self-aligning deposition process.
Solution Approach 2:
The mold structure with sloped sidewalls performs multiple functions: it defines the cavity geometry, guides the conformal deposition of magnetic and insulating layers, and enables automatic layer alignment. This self-service approach eliminates the need for additional photolithography steps for each lamination, reducing cost while maintaining precision.
3Volume of moving object
If magnetic cores are miniaturized for μSiP integration, then device size is reduced, but operating efficiency deteriorates due to increased core loss
Solution Approach 1:
The miniaturized magnetic core is segmented into multiple thin laminated layers with insulating barriers between them. This segmentation reduces eddy current losses that are particularly problematic in miniaturized devices, maintaining high operating efficiency while achieving the required small size for μSiP integration.
Solution Approach 2:
Composite laminated structures combine magnetic layers with insulating layers in a miniaturized configuration. This approach reduces core losses while maintaining the small volume required for μSiP integration, resolving the contradiction between size reduction and efficiency maintenance.
4Manufacturing precision
If highly-laminated magnetic cores are fabricated with multiple photolithography steps, then manufacturing precision is improved, but productivity decreases
Solution Approach 1:
The mold pattern is defined in advance using a single photolithography step. This preliminary action establishes the geometry for all subsequent lamination layers, enabling high-precision manufacturing without the need for repeated photolithography steps that would reduce productivity.
Solution Approach 2:
The pre-formed mold structure with sloped sidewalls automatically guides the conformal deposition process for all lamination layers. This self-service mechanism ensures high manufacturing precision while maintaining high productivity by eliminating repetitive photolithography operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach results in smaller, higher-quality, lower-cost magnetic devices with improved energy density and efficiency, allowing for more compact and reliable signal and power management systems in micro-sized packages.
Implementation Method 1
depositing a conductive seed material on the mold top portion and on a portion of the surface so as to form a conductive layer of the laminated magnetic core, wherein the conductive seed material is directed toward the mold top portion and the portion of the surface, at an angle of incidence that substantially prevents deposition of the conductive seed material on the first and second sidewalls
Implementation Method 2
forming a magnetic layer on the conductive layer
Data Source
AI summary
A method of fabricating a laminated magnetic core including: fabricating a magnetic-core mold on a surface, the magnetic-core mold including a first wall portion having a first sidewall, a second wall portion having a second sidewall, the second sidewall located opposite the first sidewall, the first and second sidewalls and a portion of the surface defining a mold cavity having a bottom width that is greater than a top width; depositing a seed material on the mold top surface and on a portion of the surface so as to form a conductive layer, wherein the seed material is directed toward the mold top surface and the portion of the surface of the substrate at an angle of incidence that substantially prevents deposition of the seed material on the first and second sidewalls; forming a magnetic layer on the conductive layer; and forming an insulating-sealing layer on the magnetic layer.