Lapping Head Fixing and Optical Wear Detection for CMP
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Solution Overview
Problem
Current methods for monitoring the surface profile and particle size of wafers during chemical mechanical polishing (CMP) are inadequate, as they rely on vernier calipers, which cannot measure the top curve of the retaining ring and result in excessive error and potential damage, limiting accurate detection of lapping head wear.
Innovation Solution
A fixing device with a bearing disk and positioning holes, accommodating multiple types of lapping heads, combined with a detector for precise surface characteristic parameter detection, including surface curves and groove depths, ensuring accurate and non-destructive assessment of lapping head wear.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If vernier calipers are used to measure the retaining ring, then the measurement process is simple, but the measurement precision is insufficient and the retaining ring may be damaged
Solution Approach 1:
The patent replaces the mechanical vernier caliper measurement system with a non-contact optical detection system. The detector captures images of the retaining ring's surface profile, and image processing algorithms automatically measure parameters such as groove depth, width, and surface curvature. This substitution eliminates mechanical contact that could damage the retaining ring while providing significantly higher measurement precision through digital image analysis.
2Device complexity
If vernier calipers are used to measure the retaining ring, then the device complexity is low, but the measurement precision and reliability are insufficient
Solution Approach 1:
The patent replaces simple mechanical measurement tools with an optical detection system that uses image capture and digital processing. The detector takes multiple images of the retaining ring from different angles, and software algorithms automatically analyze these images to determine wear parameters. This increases reliability by eliminating human measurement error and potential damage to the retaining ring, while the added complexity is justified by the significant improvement in measurement accuracy and reliability.
3Loss of time
If traditional detection methods are used, then the detection process is quick, but the detection precision of surface characteristic parameters is insufficient
Solution Approach 1:
The patent performs preliminary actions by capturing multiple images of the retaining ring simultaneously and using pre-programmed image processing algorithms to automatically extract measurement parameters. The system pre-calibrates the optical setup and stores reference data for different wear states. This allows quick detection while achieving high precision through automated image analysis, eliminating the need for slow manual measurements while providing detailed surface profile information.
Data Source
AI summary
The embodiments of the present application provide a fixing device and a detection system. The fixing device includes: a bearing disk used for bearing a lapping head, the bearing disk being provided with positioning holes and a first positioning ring, the positioning holes being used for accommodating and fixing a positioning pin of a first type of lapping head, and the first positioning ring being used for fixing a positioning disk of a second type of lapping head.