Surface-Emitting Laser Array Electrode Design for Corrosion Resistance
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Solution Overview
Problem
Surface-emitting laser arrays face challenges in balancing radiation performance and corrosion resistance, particularly when using aluminum gallium arsenide (Al x Ga (1-x) As with 0.95<x≤1, where increased radiation performance leads to enhanced corrosion susceptibility.
Innovation Solution
The surface-emitting laser array incorporates a mesa structure with a first and second reflection mirror, an active layer, and an electrode surrounding the emission region, where the electrode covers the region between adjacent light emitting parts and has a thickness greater than or equal to the height of the mesas, utilizing aluminum gallium arsenide (Al x Ga (1-x) As with 0.95<x≤1, and an upper electrode thickness of ≥2 µm to enhance both radiation performance and corrosion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If aluminum gallium arsenide (Al x Ga (1-x) As with 0.95<x≤1) is used in the reflection mirror to improve radiation performance, then the radiation performance is enhanced, but corrosion resistance deteriorates due to increased susceptibility to water intrusion
Solution Approach 1:
A thick electrode (≥2 µm) is introduced as an intermediary protective layer between the aluminum gallium arsenide reflection mirror and the external environment. This electrode layer acts as a barrier that prevents water intrusion and corrosion while allowing the high-Al content semiconductor layer to maintain its superior radiation performance for laser emission.
2Reliability
If the electrode thickness is increased to improve corrosion resistance, then protection against water intrusion is enhanced, but device complexity increases
Solution Approach 1:
The thick electrode serves multiple functions simultaneously: it provides corrosion resistance by preventing water intrusion, acts as a protective barrier for the underlying semiconductor layers, and maintains electrical connectivity. By combining multiple functions into a single component, the design avoids adding separate protective layers, thus reducing overall device complexity while achieving reliable corrosion protection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively achieves both high radiation performance and corrosion resistance by ensuring the electrode covers the inter-mesa region, preventing water intrusion and enhancing heat dissipation, thus prolonging the lifespan of the laser device and maintaining stable high-output laser emission.
Implementation Method 1
heat is conducted in a lateral direction
Implementation Method 2
a selective oxidation layer in the upper reflecting mirror having a current blocking structure made of an oxidized region and an unoxidized region
Data Source
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AI summary
A surface-emitting laser array includes a plurality of light emitting parts. Each light emitting part includes a reflection mirror including aluminum gallium arsenide (AlxGa(1-x)As) where x is greater than 0.95 but less than or equal to 1; an active layer; and an electrode surrounding an emission region, from which laser light is emitted, the electrode covering a region between adjacent light emitting parts in the plurality of light emitting parts.