Laser Beam Astigmatism Evaluation Using Processing Trace Aspect Ratios
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Solution Overview
Problem
Laser processing apparatuses face challenges in evaluating astigmatism without using concave mirrors, optical measuring instruments, and dedicated optical systems, leading to increased costs and complex position adjustments.
Innovation Solution
A method and apparatus that form processing traces on a workpiece by moving the condenser and workpiece relative to each other, calculating the aspect ratio of these traces, and determining astigmatism indices without the need for concave mirrors or optical measuring instruments, using a controller with moving mechanisms and an astigmatism correcting unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a concave mirror and optical measuring instrument are used to evaluate astigmatism, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The invention extracts the astigmatism evaluation function from the complex optical measurement system and implements it directly through the laser processing apparatus's own components (condenser, stage, and processing traces), eliminating the need for separate concave mirrors and optical measuring instruments while maintaining measurement capability
Solution Approach 2:
The laser processing apparatus is made multi-functional by enabling it to perform both laser processing and astigmatism self-evaluation using its existing components (condenser for focusing, stage for positioning, and processing traces as measurement indicators), removing the need for dedicated evaluation equipment
2Measurement precision
If a concave mirror and optical measuring instrument are used to evaluate astigmatism, then measurement precision is improved, but cost increases
Solution Approach 1:
The invention extracts the astigmatism evaluation function from expensive external optical measuring instruments and implements it through the laser processing apparatus's own components, eliminating the need to purchase and maintain separate measurement equipment while maintaining measurement capability
Solution Approach 2:
The laser processing apparatus performs self-diagnosis of its own astigmatism using its existing components (condenser, stage, and processing traces), eliminating the need for external measurement equipment and reducing overall system cost
3Measurement precision
If multiple optical components are added for astigmatism evaluation, then measurement capability is improved, but ease of operation deteriorates due to precise position adjustment requirements
Solution Approach 1:
The invention removes the need for separate optical components and their associated alignment procedures by integrating the measurement function into the existing laser processing apparatus components, eliminating position adjustment complexity
Solution Approach 2:
The apparatus uses its own processing traces as measurement indicators, eliminating the need for separate optical measuring instruments and their complex alignment procedures, thereby simplifying operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the cost of laser processing apparatuses and eliminates the need for precise position adjustments, enabling effective astigmatism evaluation and correction within the apparatus.
Implementation Method 1
The laser beam emitted from the laser oscillator is passed through the plurality of optical elements, and is ideally applied to the workpiece in a state in which the laser beam is condensed to one point
Implementation Method 2
forming a plurality of processing traces each having a spot shape by irradiating different positions of an exposed surface of a workpiece with the laser beam according to respective height positions of a condensing point
Implementation Method 3
an imaging step of obtaining an image of each of the processing traces by imaging the plurality of processing traces
Data Source
AI summary
A evaluating method includes forming a plurality of processing traces each having a spot shape by irradiating different positions of an exposed surface of a workpiece with a laser beam according to respective height positions of a condensing point by moving a condenser for the laser beam and the workpiece relative to each other along a first direction as a direction of irradiation of the workpiece with the laser beam and thereby positioning the condensing point at a plurality of the height positions, and moving the condenser and the workpiece relative to each other along a second direction intersecting the first direction, obtaining an image of each of the processing traces, calculating an aspect ratio of each of the processing traces, and calculating an index indicating a degree of astigmatism on the basis of the plurality of height positions and the aspect ratio of each of the processing traces.