Laser Beam Path Alignment Using Image-Guided Actuator Feedback
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Solution Overview
Problem
Existing laser beam alignment systems lack automation for identifying alignment targets and adjusting physical alignment, crucial for optimal laser operation in photolithography processes.
Innovation Solution
An apparatus and method for automatic alignment of optical components in a laser beam path using image acquisition, analysis, and actuators to adjust alignment based on image-derived information, employing techniques like Hough transform, Haar Cascade Classifier, and Probabilistic HoughLine Transform for beam characterization and symmetry enhancement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment procedures are used for laser optical components, then alignment can be performed with simple equipment, but the alignment process is time-consuming and lacks precision
Solution Approach 1:
The system enables automatic self-alignment of optical components through image capture and analysis. The beam position is automatically detected using cameras and image processing algorithms, eliminating the need for manual intervention. The actuator automatically adjusts component positions based on detected beam positions,实现ing self-service alignment that improves both precision and speed.
Solution Approach 2:
Manual mechanical alignment operations are replaced by an automated system combining image capture devices, computer vision algorithms, and motorized actuators. The mechanical adjustment process is substituted with an automated feedback control system that uses optical field information to drive precise positioning, significantly reducing alignment time while maintaining high precision.
2Productivity
If automated alignment systems are implemented, then alignment speed and precision improve, but system complexity increases
Solution Approach 1:
The system integrates multiple functions into a unified automated alignment platform. The image capture device serves both alignment detection and beam characterization functions. The control system handles image processing, alignment calculation, and actuator control collectively. This multi-functionality improves productivity while managing system complexity through functional integration rather than separate dedicated components for each task.
3Measurement precision
If image analysis techniques are used for beam characterization, then alignment accuracy improves, but processing complexity increases
Solution Approach 1:
The system implements feedback control where image analysis results directly inform actuator adjustments. The beam position detected through image processing feeds back to the control system, which calculates required corrections and commands actuator movements. This closed-loop feedback mechanism achieves high alignment accuracy while managing processing complexity through iterative correction rather than requiring overly complex one-shot analysis algorithms.
Data Source
AI summary
Disclosed is an apparatus for and method of permitting automatic alignment of optical components in the beam path of a laser. Images of the beam are obtained at one or more positions in the beam path. Alignment and possibly other information is derived from the images and then actuators are controlled to alter the alignment of the optical components in the beam path based on the derived information.