Laser Crystallization Device Cleaning Mirror Mechanism

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Solution Overview

Problem

Laser crystallization devices face contamination issues with the second transparent window, leading to reduced transmittance and increased operational costs due to frequent replacements.

Innovation Solution

Incorporating a cleaning mirror with a transferor that moves between the path and out of the path of the laser beams, reflecting back laser beams to remove contamination from the second transparent window during idle states, thereby maintaining high transmittance and extending the replacement period.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the second transparent window is continuously used for laser beam output, then the device operates continuously, but contamination accumulates on the window surface reducing transmittance

Engineering Contradiction:

Improvecontinuous operationVSAvoidcontamination on window

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The cleaning mirror is positioned in advance within the optical path to intercept and reflect laser beams back onto the second transparent window during idle states, performing cleaning action before contamination significantly reduces transmittance during operation

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The invention converts the harmful effect of reflected laser beams (which could cause contamination or damage) into a beneficial cleaning mechanism by directing these beams onto the window surface during idle states to remove accumulated contamination

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

2Object-affected harmful factors

If the cleaning mirror is positioned in the laser beam path during operation, then contamination is cleaned, but the laser beam path is blocked

Engineering Contradiction:

Improvecontamination removalVSAvoidlaser beam output

Core Design Contradiction:

Object-affected harmful factorsVSProductivity

Solution Approach 1:

The cleaning mirror is made movable rather than fixed, allowing it to dynamically change position between being in the optical path during idle states for cleaning and being moved out of the path during operation for laser beam output

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The cleaning mirror operates periodically during idle states between laser crystallization operations, rather than continuously, allowing alternating periods of cleaning and normal operation

Inventive Principle:

Principle #19Periodic action

3Reliability

If the second transparent window is replaced frequently to maintain transmittance, then high transmittance is maintained, but operational costs increase

Engineering Contradiction:

Improvetransmittance maintenanceVSAvoidreplacement cost

Core Design Contradiction:

ReliabilityVSLoss of substance

Solution Approach 1:

The system performs self-cleaning of the second transparent window using its own laser beams reflected by the cleaning mirror during idle states, eliminating the need for external maintenance or frequent replacements

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Instead of discarding (replacing) the contaminated window, the system recovers its transmittance by cleaning the accumulated contamination off the window surface using reflected laser beams

Inventive Principle:

Principle #34Discarding and recovering

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces contamination on the second transparent window, maintaining high transmittance for a longer duration and reducing operational costs by extending the replacement period of the window.

Implementation Method 1

A laser crystallization device excites a gas medium by an electric discharge process to generate laser beams

Methodology Applied

Scientific EffectElectric discharge: Electric Arc

Implementation Method 2

excites a gas medium by an electric discharge process to generate laser beams, amplifies the laser beams by resonance

Methodology Applied

Scientific EffectLaser: Laser

Implementation Method 3

disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS11087980B2Laser crystallization device

Publication Date: 2021.08.10 SAMSUNG DISPLAY CO LTD

AI summary

A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.