High-Density Laser Diode Stack Fabrication via Vacuum Reflow

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for fabricating high-density laser diode stacks face challenges such as damage to anti-reflection and high-reflection coatings, increased stress during assembly, oxidation of substrate materials, and the need for multiple processing steps, particularly due to fluxed soft-soldering interconnection methods.

Innovation Solution

A method involving the application of a solder layer to the wafer before cleaving the laser diode bars, followed by direct contact and bonding in a vacuum environment, where the solder is reflowed to join the bars while applying coatings, minimizing oxidation and reducing the number of processing steps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If fluxed soft-soldering interconnection methods are used to join laser diode bars, then ease of manufacture is improved, but manufacturing precision deteriorates due to damage to anti-reflection and high-reflection coatings

Engineering Contradiction:
Improveease of joining laser diode barsVSAvoidintegrity of anti-reflection and high-reflection coatings
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent applies inert atmosphere welding (specifically electron beam welding or gas tungsten arc welding in inert gas environment) to join the laser diode bars. This inert environment protects the anti-reflection and high-reflection coatings from damage that would occur with fluxed soft-soldering, while still achieving reliable electrical and thermal connections between the bars.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

2Reliability

If multiple processing steps including separate stacking and reflow steps are used, then reliability of joints is improved, but productivity deteriorates due to increased number of processing steps

Engineering Contradiction:
Improvereliability of laser diode bar jointsVSAvoidfabrication speed of laser diode stacks
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent combines the stacking and reflow operations into a single integrated processing step. The laser diode bars are stacked in their final configuration and then welded directly without a separate reflow step, eliminating redundant processing while maintaining joint reliability through the use of inert atmosphere welding parameters optimized for direct bonding.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent performs preliminary alignment and positioning of the laser diode bars in their final stack configuration before welding. This preliminary action ensures that the bars are correctly positioned and that the inert atmosphere welding can proceed directly without requiring subsequent reflow or repositioning steps.

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If laser diode bars are processed in air environment, then ease of operation is improved, but object-generated harmful factors worsen due to oxidation of substrate materials

Engineering Contradiction:
Improveease of processing laser diode barsVSAvoidoxidation of substrate materials
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent performs the welding operation in an inert gas environment (such as nitrogen or argon atmosphere) to prevent oxidation of the laser diode bar substrate materials during processing. This inert environment protects the semiconductor materials from oxidative damage while allowing the welding process to proceed effectively.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the risk of coating damage, streamlines the assembly process, minimizes substrate oxidation, and eliminates the need for additional stacking and reflow steps, resulting in a high-density stack with improved reliability and efficiency.

Implementation Method 1

the solder is reflowed to join the bars

Methodology Applied
Scientific EffectReflow: Melting

Implementation Method 2

minimizes oxidation

Methodology Applied
Scientific EffectOxidation prevention: Oxidation

Data Source

PatentEP3605757B1Methods of fabrication of high-density laser diode stacks
Publication Date: 2023.03.15 NORTHROP GRUMMAN SYSTEMS CORP
  • EP3605757B1 patent drawingFigure 1A~1B
  • EP3605757B1 patent drawingFigure 2A~2C
  • EP3605757B1 patent drawingFigure 2D~2E

AI summary

A method of fabricating a high-density laser diode stack (100) is disclosed. The laser diode bars (110, 112, 114, 116, 118) each have an emitter surface (132) and opposing surfaces on either side of the emitter surface. Each laser diode bar has metallization layers (210, 212) on the opposing surfaces and a solder layer (120; 220) on at least one of the metallization layers (210, 212). The solder layer (120; 220) is applied to a semiconductor wafer (200) prior to cleaving the wafer to create the laser diode bars. The laser diode bars are arranged in a stack such that the emitter surfaces (132) of the bars are facing the same direction. The stack of laser diode bars is placed in a vacuum chamber. An antireflection coating (274) is deposited on the emitter surfaces (132) of the laser diode bars in the chamber. The laser diode bars are joined by applying a temperature sufficient to reflow the solder layers (120; 220) in the chamber.