Laser-Engraved 2D Code Markers for Substrate Processing Parts
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Solution Overview
Problem
Current part management in substrate processing apparatuses relies on manual input and recording of serial numbers, which is inefficient and prone to errors, and can be affected by wear and contamination, especially when stickers or directly drawn markers are used.
Innovation Solution
A marker with two-dimensional code information is engraved directly onto the parts using laser processing, forming grooves or color contrasts that are resistant to wear and can be read by a reader, ensuring accurate and integral part management without adverse effects on the processing apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a tape displaying serial number is attached to the part for manual input and recording, then part management can be performed, but the process is inefficient and prone to errors
Solution Approach 1:
The patent replaces the manual mechanical process of attaching tapes and inputting serial numbers with an automated optical scanning system. A reader automatically scans the two-dimensional code marker on the part, and a control unit processes the information, eliminating manual labor and reducing errors in part management
Solution Approach 2:
The patent uses a two-dimensional code marker that encodes part information in a compact graphical format. This coded representation serves as an information copy that can be rapidly read and processed by the scanning system, replacing the need for manual reading of serial numbers from tapes
2Reliability
If a marker is directly drawn or sticker is attached to the part, then part identification is possible, but the marker is affected by wear and contamination
Solution Approach 1:
The patent applies local quality by creating a marker with specific optical properties on the part surface. The marker has a distinct reflectivity characteristic that differs from the surrounding part surface, allowing the reader to reliably detect and read the two-dimensional code even under varying environmental conditions
Solution Approach 2:
The patent utilizes optical contrast (analogous to color changes) where the marker has different reflectivity properties compared to the part surface. This optical difference enables reliable detection by the reader's sensor, maintaining readability despite wear or contamination
3Loss of information
If manual input and recording of serial numbers is used, then part tracking can be performed, but the process is time-consuming and error-prone
Solution Approach 1:
The patent replaces manual information input with automated optical scanning. The reader rapidly captures the two-dimensional code image, and the control unit automatically decodes and processes the information, eliminating time-consuming manual typing and reducing transcription errors
Solution Approach 2:
The patent prepares the part with a two-dimensional code marker that contains all necessary identification information in a compact format before the part enters the processing system. This preliminary encoding allows for rapid information retrieval without requiring time-consuming manual data entry during part management operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances part management efficiency and accuracy by embedding readable two-dimensional code information within the parts, reducing the risk of contamination and wear-related issues, and allows for error correction, thereby improving the overall management and tracking of parts in substrate processing systems.
Implementation Method 1
A marker with two-dimensional code information is engraved directly onto the parts using laser processing
Data Source
AI summary
A part for substrate processing apparatus includes a marker with at least one of a surface and an inside of the part processed. The marker is configured such that two-dimensional code information is readable by at least one of a groove formed in the part by processing and two or more types of colors.