Laser Inspection System for Flat Panel Displays
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Solution Overview
Problem
Existing inspection systems for flat panel displays are inefficient in reducing inspection time and improving inspection efficiency, particularly in detecting defects during the manufacturing process of these devices.
Innovation Solution
A laser inspection system comprising a stage, two laser units emitting laser beams of different colors, and detectors to simultaneously irradiate and detect the beams on inspection objects of varying specifications, allowing for immediate defect checking and automated logistics, thereby reducing errors and increasing yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single laser unit is used for inspection, then the device complexity is low, but the inspection time is long and inspection efficiency is reduced
Solution Approach 1:
The inspection system is divided into multiple laser units (first laser unit and second laser unit), each responsible for inspecting different regions or aspects of the inspection object. This segmentation allows parallel inspection operations, significantly improving inspection efficiency while maintaining manageable system complexity through modular architecture
Solution Approach 2:
Multiple laser units are combined to work simultaneously on the same inspection object from different positions or angles. The first laser unit and second laser unit operate in parallel, with their respective laser beams combined to provide comprehensive inspection coverage, achieving high productivity through coordinated multi-unit operation
2Loss of time
If multiple laser units are used to improve inspection efficiency, then inspection time is reduced, but the device complexity increases
Solution Approach 1:
The first laser unit and second laser unit are pre-positioned at different locations relative to the inspection object, with their laser beams directed along different paths. This preliminary arrangement allows simultaneous inspection operations without requiring complex real-time coordination, reducing inspection time while controlling device complexity through fixed geometric configuration
Solution Approach 2:
The inspection object itself serves as an intermediary that receives laser beams from multiple units and directs them toward detectors. This natural intermediary role simplifies the system architecture by eliminating the need for complex beam combining optics or synchronized control mechanisms, allowing parallel operation with minimal added complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system significantly reduces inspection time, increases efficiency, and allows for easy management of process capability by adjusting specification distribution and center through the arrangement of laser units, leading to improved defect detection and reduced errors.
Implementation Method 1
a first laser unit spaced apart from the stage in a third direction perpendicular to the plane, where the first laser unit emits a first laser beam proceeding in a direction parallel to the plane
Implementation Method 2
when a height of the inspection object from the top surface of the stage is greater than or equal to the minimum allowable specification, the first detector may detect the first laser beam reflected or scattered from the inspection object
Data Source
AI summary
A laser inspection system includes a stage including a top surface parallel to a plane defined by a first direction and a second direction intersecting the first direction, a first laser unit spaced apart from the stage in a third direction perpendicular to the plane, where the first laser unit emits a first laser beam proceeding in a direction parallel to the plane, a second laser unit spaced apart from the first laser unit in the third direction, where the second laser unit emits a second laser beam proceeding in a direction parallel to a proceeding direction of the first laser beam, and an inspection object spaced apart from the first laser unit in the first direction on the top surface of the stage, where the inspection object has a maximum allowable specification and a minimum allowable specification in the third direction from the top surface of the stage.